7/17/2012	8:00:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	8:00:40 AM	Recipe started at 8:00 AM
7/17/2012	8:00:40 AM	Helium valve closed
7/17/2012	8:00:40 AM	H2 valve closed
7/17/2012	8:00:40 AM	BCl3 valve closed
7/17/2012	8:00:40 AM	PH3 valve closed
7/17/2012	8:00:40 AM	SiCl4 pre valve closed
7/17/2012	8:00:40 AM	SiCl4 post valve closed
7/17/2012	8:00:40 AM	Main Vac valve closed
7/17/2012	8:00:40 AM	Bypass valve closed
7/17/2012	8:00:40 AM	Bubbler valve closed
7/17/2012	8:00:40 AM	Helium MFC set to  0.000000
7/17/2012	8:00:40 AM	H2 MFC set to  0.000000
7/17/2012	8:00:40 AM	BCl3 MFC set to  0.000000
7/17/2012	8:00:40 AM	PH3 MFC set to  0.000000
7/17/2012	8:00:40 AM	SiCl4 MFC set to  0.000000
7/17/2012	8:00:40 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	8:00:41 AM	Tube furnace set to 0
7/17/2012	8:00:44 AM	H2 valve closed
7/17/2012	8:00:44 AM	BCl3 valve closed
7/17/2012	8:00:44 AM	PH3 valve closed
7/17/2012	8:00:44 AM	SiCl4 pre valve closed
7/17/2012	8:00:44 AM	SiCl4 post valve closed
7/17/2012	8:00:44 AM	Main Vac valve closed
7/17/2012	8:00:44 AM	Bypass valve closed
7/17/2012	8:00:44 AM	Bubbler valve closed
7/17/2012	8:00:44 AM	Helium valve opened
7/17/2012	8:00:44 AM	Helium MFC set to  500.000000
7/17/2012	8:00:44 AM	H2 MFC set to  0.000000
7/17/2012	8:00:44 AM	BCl3 MFC set to  0.000000
7/17/2012	8:00:44 AM	PH3 MFC set to  0.000000
7/17/2012	8:00:44 AM	SiCl4 MFC set to  0.000000
7/17/2012	8:00:44 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	8:00:44 AM	Tube furnace set to 0
7/17/2012	8:01:56 AM	Helium valve closed
7/17/2012	8:01:56 AM	H2 valve closed
7/17/2012	8:01:56 AM	BCl3 valve closed
7/17/2012	8:01:56 AM	PH3 valve closed
7/17/2012	8:01:56 AM	SiCl4 pre valve closed
7/17/2012	8:01:56 AM	SiCl4 post valve closed
7/17/2012	8:01:56 AM	Main Vac valve closed
7/17/2012	8:01:56 AM	Bypass valve closed
7/17/2012	8:01:56 AM	Bubbler valve closed
7/17/2012	8:01:56 AM	Helium MFC set to  0.000000
7/17/2012	8:01:56 AM	H2 MFC set to  0.000000
7/17/2012	8:01:56 AM	BCl3 MFC set to  0.000000
7/17/2012	8:01:56 AM	PH3 MFC set to  0.000000
7/17/2012	8:01:56 AM	SiCl4 MFC set to  0.000000
7/17/2012	8:01:56 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	8:01:57 AM	Tube furnace set to 0
7/17/2012	8:01:58 AM	Run finished at 8:01 AM
7/17/2012	8:01:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	8:04:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	8:04:12 AM	Recipe started at 8:04 AM
7/17/2012	8:04:12 AM	Helium valve closed
7/17/2012	8:04:12 AM	H2 valve closed
7/17/2012	8:04:12 AM	BCl3 valve closed
7/17/2012	8:04:12 AM	PH3 valve closed
7/17/2012	8:04:12 AM	SiCl4 pre valve closed
7/17/2012	8:04:12 AM	SiCl4 post valve closed
7/17/2012	8:04:12 AM	Main Vac valve closed
7/17/2012	8:04:12 AM	Bubbler valve closed
7/17/2012	8:04:12 AM	Bypass valve opened
7/17/2012	8:04:12 AM	Helium MFC set to  0.000000
7/17/2012	8:04:12 AM	H2 MFC set to  0.000000
7/17/2012	8:04:12 AM	BCl3 MFC set to  0.000000
7/17/2012	8:04:12 AM	PH3 MFC set to  0.000000
7/17/2012	8:04:12 AM	SiCl4 MFC set to  0.000000
7/17/2012	8:04:12 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	8:04:12 AM	Tube furnace set to 0
7/17/2012	8:05:19 AM	Helium valve closed
7/17/2012	8:05:19 AM	H2 valve closed
7/17/2012	8:05:19 AM	BCl3 valve closed
7/17/2012	8:05:19 AM	PH3 valve closed
7/17/2012	8:05:19 AM	SiCl4 pre valve closed
7/17/2012	8:05:19 AM	SiCl4 post valve closed
7/17/2012	8:05:19 AM	Main Vac valve closed
7/17/2012	8:05:19 AM	Bubbler valve closed
7/17/2012	8:05:19 AM	Bypass valve opened
7/17/2012	8:05:19 AM	Helium MFC set to  0.000000
7/17/2012	8:05:19 AM	H2 MFC set to  0.000000
7/17/2012	8:05:19 AM	BCl3 MFC set to  0.000000
7/17/2012	8:05:19 AM	PH3 MFC set to  0.000000
7/17/2012	8:05:19 AM	SiCl4 MFC set to  0.000000
7/17/2012	8:05:19 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	8:05:19 AM	Tube furnace set to 0
7/17/2012	8:06:19 AM	Helium valve closed
7/17/2012	8:06:19 AM	H2 valve closed
7/17/2012	8:06:19 AM	BCl3 valve closed
7/17/2012	8:06:19 AM	PH3 valve closed
7/17/2012	8:06:19 AM	SiCl4 pre valve closed
7/17/2012	8:06:19 AM	SiCl4 post valve closed
7/17/2012	8:06:19 AM	Bypass valve closed
7/17/2012	8:06:19 AM	Bubbler valve closed
7/17/2012	8:06:19 AM	Main Vac valve opened
7/17/2012	8:06:19 AM	Helium MFC set to  0.000000
7/17/2012	8:06:19 AM	H2 MFC set to  0.000000
7/17/2012	8:06:19 AM	BCl3 MFC set to  0.000000
7/17/2012	8:06:19 AM	PH3 MFC set to  0.000000
7/17/2012	8:06:19 AM	SiCl4 MFC set to  0.000000
7/17/2012	8:06:19 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	8:06:19 AM	Tube furnace set to 0
7/17/2012	8:06:20 AM	Run finished at 8:06 AM
7/17/2012	8:06:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	10:04:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	10:04:31 AM	Recipe started at 10:04 AM
7/17/2012	10:04:31 AM	Helium valve closed
7/17/2012	10:04:31 AM	H2 valve closed
7/17/2012	10:04:31 AM	BCl3 valve closed
7/17/2012	10:04:31 AM	PH3 valve closed
7/17/2012	10:04:31 AM	SiCl4 pre valve closed
7/17/2012	10:04:31 AM	SiCl4 post valve closed
7/17/2012	10:04:31 AM	Main Vac valve closed
7/17/2012	10:04:31 AM	Bypass valve closed
7/17/2012	10:04:31 AM	Bubbler valve closed
7/17/2012	10:04:31 AM	Helium MFC set to  0.000000
7/17/2012	10:04:31 AM	H2 MFC set to  0.000000
7/17/2012	10:04:31 AM	BCl3 MFC set to  0.000000
7/17/2012	10:04:31 AM	PH3 MFC set to  0.000000
7/17/2012	10:04:31 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:04:31 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:04:31 AM	Tube furnace set to 0
7/17/2012	10:04:34 AM	H2 valve closed
7/17/2012	10:04:34 AM	BCl3 valve closed
7/17/2012	10:04:34 AM	PH3 valve closed
7/17/2012	10:04:34 AM	SiCl4 pre valve closed
7/17/2012	10:04:34 AM	SiCl4 post valve closed
7/17/2012	10:04:34 AM	Main Vac valve closed
7/17/2012	10:04:34 AM	Bypass valve closed
7/17/2012	10:04:34 AM	Bubbler valve closed
7/17/2012	10:04:34 AM	Helium valve opened
7/17/2012	10:04:34 AM	Helium MFC set to  500.000000
7/17/2012	10:04:34 AM	H2 MFC set to  0.000000
7/17/2012	10:04:34 AM	BCl3 MFC set to  0.000000
7/17/2012	10:04:34 AM	PH3 MFC set to  0.000000
7/17/2012	10:04:34 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:04:34 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:04:34 AM	Tube furnace set to 0
7/17/2012	10:05:47 AM	Helium valve closed
7/17/2012	10:05:47 AM	H2 valve closed
7/17/2012	10:05:47 AM	BCl3 valve closed
7/17/2012	10:05:47 AM	PH3 valve closed
7/17/2012	10:05:47 AM	SiCl4 pre valve closed
7/17/2012	10:05:47 AM	SiCl4 post valve closed
7/17/2012	10:05:47 AM	Main Vac valve closed
7/17/2012	10:05:47 AM	Bypass valve closed
7/17/2012	10:05:47 AM	Bubbler valve closed
7/17/2012	10:05:47 AM	Helium MFC set to  0.000000
7/17/2012	10:05:47 AM	H2 MFC set to  0.000000
7/17/2012	10:05:47 AM	BCl3 MFC set to  0.000000
7/17/2012	10:05:47 AM	PH3 MFC set to  0.000000
7/17/2012	10:05:47 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:05:47 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:05:47 AM	Tube furnace set to 0
7/17/2012	10:05:48 AM	Run finished at 10:05 AM
7/17/2012	10:05:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	10:12:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	10:12:08 AM	Recipe started at 10:12 AM
7/17/2012	10:12:08 AM	Helium valve closed
7/17/2012	10:12:08 AM	H2 valve closed
7/17/2012	10:12:08 AM	BCl3 valve closed
7/17/2012	10:12:08 AM	PH3 valve closed
7/17/2012	10:12:08 AM	SiCl4 pre valve closed
7/17/2012	10:12:08 AM	SiCl4 post valve closed
7/17/2012	10:12:08 AM	Main Vac valve closed
7/17/2012	10:12:08 AM	Bubbler valve closed
7/17/2012	10:12:08 AM	Bypass valve opened
7/17/2012	10:12:08 AM	Helium MFC set to  0.000000
7/17/2012	10:12:08 AM	H2 MFC set to  0.000000
7/17/2012	10:12:08 AM	BCl3 MFC set to  0.000000
7/17/2012	10:12:08 AM	PH3 MFC set to  0.000000
7/17/2012	10:12:08 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:12:08 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:12:08 AM	Tube furnace set to 0
7/17/2012	10:14:33 AM	Helium valve closed
7/17/2012	10:14:33 AM	H2 valve closed
7/17/2012	10:14:33 AM	BCl3 valve closed
7/17/2012	10:14:33 AM	PH3 valve closed
7/17/2012	10:14:33 AM	SiCl4 pre valve closed
7/17/2012	10:14:33 AM	SiCl4 post valve closed
7/17/2012	10:14:33 AM	Main Vac valve closed
7/17/2012	10:14:33 AM	Bubbler valve closed
7/17/2012	10:14:33 AM	Bypass valve opened
7/17/2012	10:14:33 AM	Helium MFC set to  0.000000
7/17/2012	10:14:33 AM	H2 MFC set to  0.000000
7/17/2012	10:14:33 AM	BCl3 MFC set to  0.000000
7/17/2012	10:14:33 AM	PH3 MFC set to  0.000000
7/17/2012	10:14:33 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:14:33 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:14:33 AM	Tube furnace set to 0
7/17/2012	10:15:33 AM	Helium valve closed
7/17/2012	10:15:34 AM	H2 valve closed
7/17/2012	10:15:34 AM	BCl3 valve closed
7/17/2012	10:15:34 AM	PH3 valve closed
7/17/2012	10:15:34 AM	SiCl4 pre valve closed
7/17/2012	10:15:34 AM	SiCl4 post valve closed
7/17/2012	10:15:34 AM	Bypass valve closed
7/17/2012	10:15:34 AM	Bubbler valve closed
7/17/2012	10:15:34 AM	Main Vac valve opened
7/17/2012	10:15:34 AM	Helium MFC set to  0.000000
7/17/2012	10:15:34 AM	H2 MFC set to  0.000000
7/17/2012	10:15:34 AM	BCl3 MFC set to  0.000000
7/17/2012	10:15:34 AM	PH3 MFC set to  0.000000
7/17/2012	10:15:34 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:15:34 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:15:34 AM	Tube furnace set to 0
7/17/2012	10:15:35 AM	Run finished at 10:15 AM
7/17/2012	10:15:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	10:18:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	10:18:48 AM	Recipe started at 10:18 AM
7/17/2012	10:18:48 AM	Helium valve closed
7/17/2012	10:18:48 AM	H2 valve closed
7/17/2012	10:18:48 AM	BCl3 valve closed
7/17/2012	10:18:48 AM	PH3 valve closed
7/17/2012	10:18:48 AM	SiCl4 pre valve closed
7/17/2012	10:18:48 AM	SiCl4 post valve closed
7/17/2012	10:18:48 AM	Main Vac valve closed
7/17/2012	10:18:48 AM	Bypass valve closed
7/17/2012	10:18:48 AM	Bubbler valve closed
7/17/2012	10:18:48 AM	Helium MFC set to  0.000000
7/17/2012	10:18:48 AM	H2 MFC set to  0.000000
7/17/2012	10:18:48 AM	BCl3 MFC set to  0.000000
7/17/2012	10:18:48 AM	PH3 MFC set to  0.000000
7/17/2012	10:18:48 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:18:48 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:18:49 AM	Tube furnace set to 0
7/17/2012	10:18:52 AM	H2 valve closed
7/17/2012	10:18:52 AM	BCl3 valve closed
7/17/2012	10:18:52 AM	PH3 valve closed
7/17/2012	10:18:52 AM	SiCl4 pre valve closed
7/17/2012	10:18:52 AM	SiCl4 post valve closed
7/17/2012	10:18:52 AM	Main Vac valve closed
7/17/2012	10:18:52 AM	Bypass valve closed
7/17/2012	10:18:52 AM	Bubbler valve closed
7/17/2012	10:18:52 AM	Helium valve opened
7/17/2012	10:18:52 AM	Helium MFC set to  500.000000
7/17/2012	10:18:52 AM	H2 MFC set to  0.000000
7/17/2012	10:18:52 AM	BCl3 MFC set to  0.000000
7/17/2012	10:18:52 AM	PH3 MFC set to  0.000000
7/17/2012	10:18:52 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:18:52 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:18:52 AM	Tube furnace set to 0
7/17/2012	10:20:06 AM	Helium valve closed
7/17/2012	10:20:06 AM	H2 valve closed
7/17/2012	10:20:06 AM	BCl3 valve closed
7/17/2012	10:20:06 AM	PH3 valve closed
7/17/2012	10:20:06 AM	SiCl4 pre valve closed
7/17/2012	10:20:06 AM	SiCl4 post valve closed
7/17/2012	10:20:06 AM	Main Vac valve closed
7/17/2012	10:20:06 AM	Bypass valve closed
7/17/2012	10:20:06 AM	Bubbler valve closed
7/17/2012	10:20:06 AM	Helium MFC set to  0.000000
7/17/2012	10:20:06 AM	H2 MFC set to  0.000000
7/17/2012	10:20:06 AM	BCl3 MFC set to  0.000000
7/17/2012	10:20:06 AM	PH3 MFC set to  0.000000
7/17/2012	10:20:06 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:20:06 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:20:06 AM	Tube furnace set to 0
7/17/2012	10:20:07 AM	Run finished at 10:20 AM
7/17/2012	10:20:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	10:22:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	10:22:19 AM	Recipe started at 10:22 AM
7/17/2012	10:22:19 AM	Helium valve closed
7/17/2012	10:22:19 AM	H2 valve closed
7/17/2012	10:22:19 AM	BCl3 valve closed
7/17/2012	10:22:19 AM	PH3 valve closed
7/17/2012	10:22:19 AM	SiCl4 pre valve closed
7/17/2012	10:22:19 AM	SiCl4 post valve closed
7/17/2012	10:22:19 AM	Main Vac valve closed
7/17/2012	10:22:19 AM	Bubbler valve closed
7/17/2012	10:22:19 AM	Bypass valve opened
7/17/2012	10:22:19 AM	Helium MFC set to  0.000000
7/17/2012	10:22:19 AM	H2 MFC set to  0.000000
7/17/2012	10:22:19 AM	BCl3 MFC set to  0.000000
7/17/2012	10:22:19 AM	PH3 MFC set to  0.000000
7/17/2012	10:22:19 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:22:19 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:22:19 AM	Tube furnace set to 0
7/17/2012	10:23:30 AM	Helium valve closed
7/17/2012	10:23:30 AM	H2 valve closed
7/17/2012	10:23:30 AM	BCl3 valve closed
7/17/2012	10:23:30 AM	PH3 valve closed
7/17/2012	10:23:30 AM	SiCl4 pre valve closed
7/17/2012	10:23:30 AM	SiCl4 post valve closed
7/17/2012	10:23:31 AM	Main Vac valve closed
7/17/2012	10:23:31 AM	Bubbler valve closed
7/17/2012	10:23:31 AM	Bypass valve opened
7/17/2012	10:23:31 AM	Helium MFC set to  0.000000
7/17/2012	10:23:31 AM	H2 MFC set to  0.000000
7/17/2012	10:23:31 AM	BCl3 MFC set to  0.000000
7/17/2012	10:23:31 AM	PH3 MFC set to  0.000000
7/17/2012	10:23:31 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:23:31 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:23:31 AM	Tube furnace set to 0
7/17/2012	10:24:31 AM	Helium valve closed
7/17/2012	10:24:31 AM	H2 valve closed
7/17/2012	10:24:31 AM	BCl3 valve closed
7/17/2012	10:24:31 AM	PH3 valve closed
7/17/2012	10:24:31 AM	SiCl4 pre valve closed
7/17/2012	10:24:31 AM	SiCl4 post valve closed
7/17/2012	10:24:31 AM	Bypass valve closed
7/17/2012	10:24:31 AM	Bubbler valve closed
7/17/2012	10:24:31 AM	Main Vac valve opened
7/17/2012	10:24:31 AM	Helium MFC set to  0.000000
7/17/2012	10:24:31 AM	H2 MFC set to  0.000000
7/17/2012	10:24:31 AM	BCl3 MFC set to  0.000000
7/17/2012	10:24:31 AM	PH3 MFC set to  0.000000
7/17/2012	10:24:31 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:24:31 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:24:31 AM	Tube furnace set to 0
7/17/2012	10:24:32 AM	Run finished at 10:24 AM
7/17/2012	10:24:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	10:44:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	10:44:28 AM	Recipe started at 10:44 AM
7/17/2012	10:44:28 AM	Helium valve closed
7/17/2012	10:44:28 AM	H2 valve closed
7/17/2012	10:44:28 AM	BCl3 valve closed
7/17/2012	10:44:28 AM	PH3 valve closed
7/17/2012	10:44:28 AM	SiCl4 pre valve closed
7/17/2012	10:44:28 AM	SiCl4 post valve closed
7/17/2012	10:44:28 AM	Main Vac valve closed
7/17/2012	10:44:28 AM	Bubbler valve closed
7/17/2012	10:44:28 AM	Bypass valve opened
7/17/2012	10:44:28 AM	Helium MFC set to  0.000000
7/17/2012	10:44:28 AM	H2 MFC set to  0.000000
7/17/2012	10:44:28 AM	BCl3 MFC set to  0.000000
7/17/2012	10:44:28 AM	PH3 MFC set to  0.000000
7/17/2012	10:44:28 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:44:28 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:44:28 AM	Tube furnace set to 0
7/17/2012	10:44:28 AM	Helium valve closed
7/17/2012	10:44:28 AM	H2 valve closed
7/17/2012	10:44:28 AM	BCl3 valve closed
7/17/2012	10:44:28 AM	PH3 valve closed
7/17/2012	10:44:28 AM	SiCl4 pre valve closed
7/17/2012	10:44:28 AM	SiCl4 post valve closed
7/17/2012	10:44:28 AM	Main Vac valve closed
7/17/2012	10:44:28 AM	Bubbler valve closed
7/17/2012	10:44:28 AM	Bypass valve opened
7/17/2012	10:44:28 AM	Helium MFC set to  0.000000
7/17/2012	10:44:28 AM	H2 MFC set to  0.000000
7/17/2012	10:44:28 AM	BCl3 MFC set to  0.000000
7/17/2012	10:44:28 AM	PH3 MFC set to  0.000000
7/17/2012	10:44:28 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:44:28 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:44:28 AM	Tube furnace set to 0
7/17/2012	10:44:29 AM	Helium valve closed
7/17/2012	10:44:29 AM	H2 valve closed
7/17/2012	10:44:29 AM	BCl3 valve closed
7/17/2012	10:44:29 AM	PH3 valve closed
7/17/2012	10:44:29 AM	SiCl4 pre valve closed
7/17/2012	10:44:29 AM	SiCl4 post valve closed
7/17/2012	10:44:29 AM	Bypass valve closed
7/17/2012	10:44:29 AM	Bubbler valve closed
7/17/2012	10:44:29 AM	Main Vac valve opened
7/17/2012	10:44:29 AM	Helium MFC set to  0.000000
7/17/2012	10:44:29 AM	H2 MFC set to  0.000000
7/17/2012	10:44:29 AM	BCl3 MFC set to  0.000000
7/17/2012	10:44:29 AM	PH3 MFC set to  0.000000
7/17/2012	10:44:29 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:44:29 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:44:30 AM	Tube furnace set to 0
7/17/2012	10:44:30 AM	H2 valve closed
7/17/2012	10:44:30 AM	BCl3 valve closed
7/17/2012	10:44:30 AM	PH3 valve closed
7/17/2012	10:44:30 AM	SiCl4 pre valve closed
7/17/2012	10:44:30 AM	SiCl4 post valve closed
7/17/2012	10:44:30 AM	Bypass valve closed
7/17/2012	10:44:30 AM	Bubbler valve closed
7/17/2012	10:44:30 AM	Helium valve opened
7/17/2012	10:44:30 AM	Main Vac valve opened
7/17/2012	10:44:30 AM	Helium MFC set to  20.000000
7/17/2012	10:44:30 AM	H2 MFC set to  0.000000
7/17/2012	10:44:30 AM	BCl3 MFC set to  0.000000
7/17/2012	10:44:30 AM	PH3 MFC set to  0.000000
7/17/2012	10:44:30 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:44:30 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:44:30 AM	Tube furnace set to 0
7/17/2012	10:45:00 AM	Helium valve closed
7/17/2012	10:45:00 AM	H2 valve closed
7/17/2012	10:45:00 AM	BCl3 valve closed
7/17/2012	10:45:00 AM	PH3 valve closed
7/17/2012	10:45:00 AM	SiCl4 pre valve closed
7/17/2012	10:45:00 AM	SiCl4 post valve closed
7/17/2012	10:45:00 AM	Bypass valve closed
7/17/2012	10:45:00 AM	Bubbler valve closed
7/17/2012	10:45:00 AM	Main Vac valve opened
7/17/2012	10:45:00 AM	Helium MFC set to  0.000000
7/17/2012	10:45:00 AM	H2 MFC set to  0.000000
7/17/2012	10:45:00 AM	BCl3 MFC set to  0.000000
7/17/2012	10:45:00 AM	PH3 MFC set to  0.000000
7/17/2012	10:45:00 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:45:00 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:45:00 AM	Tube furnace set to 0
7/17/2012	10:45:30 AM	H2 valve closed
7/17/2012	10:45:31 AM	BCl3 valve closed
7/17/2012	10:45:31 AM	PH3 valve closed
7/17/2012	10:45:31 AM	SiCl4 pre valve closed
7/17/2012	10:45:31 AM	SiCl4 post valve closed
7/17/2012	10:45:31 AM	Bypass valve closed
7/17/2012	10:45:31 AM	Bubbler valve closed
7/17/2012	10:45:31 AM	Helium valve opened
7/17/2012	10:45:31 AM	Main Vac valve opened
7/17/2012	10:45:31 AM	Helium MFC set to  20.000000
7/17/2012	10:45:31 AM	H2 MFC set to  0.000000
7/17/2012	10:45:31 AM	BCl3 MFC set to  0.000000
7/17/2012	10:45:31 AM	PH3 MFC set to  0.000000
7/17/2012	10:45:31 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:45:31 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:45:31 AM	Tube furnace set to 0
7/17/2012	10:46:01 AM	Helium valve closed
7/17/2012	10:46:01 AM	H2 valve closed
7/17/2012	10:46:01 AM	BCl3 valve closed
7/17/2012	10:46:01 AM	PH3 valve closed
7/17/2012	10:46:01 AM	SiCl4 pre valve closed
7/17/2012	10:46:01 AM	SiCl4 post valve closed
7/17/2012	10:46:01 AM	Bypass valve closed
7/17/2012	10:46:01 AM	Bubbler valve closed
7/17/2012	10:46:01 AM	Main Vac valve opened
7/17/2012	10:46:01 AM	Helium MFC set to  0.000000
7/17/2012	10:46:01 AM	H2 MFC set to  0.000000
7/17/2012	10:46:01 AM	BCl3 MFC set to  0.000000
7/17/2012	10:46:01 AM	PH3 MFC set to  0.000000
7/17/2012	10:46:01 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:46:01 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:46:01 AM	Tube furnace set to 0
7/17/2012	10:46:31 AM	H2 valve closed
7/17/2012	10:46:31 AM	BCl3 valve closed
7/17/2012	10:46:31 AM	PH3 valve closed
7/17/2012	10:46:31 AM	SiCl4 pre valve closed
7/17/2012	10:46:31 AM	SiCl4 post valve closed
7/17/2012	10:46:31 AM	Bypass valve closed
7/17/2012	10:46:31 AM	Bubbler valve closed
7/17/2012	10:46:31 AM	Helium valve opened
7/17/2012	10:46:31 AM	Main Vac valve opened
7/17/2012	10:46:31 AM	Helium MFC set to  20.000000
7/17/2012	10:46:31 AM	H2 MFC set to  0.000000
7/17/2012	10:46:31 AM	BCl3 MFC set to  0.000000
7/17/2012	10:46:31 AM	PH3 MFC set to  0.000000
7/17/2012	10:46:31 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:46:31 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:46:31 AM	Tube furnace set to 0
7/17/2012	10:47:01 AM	Helium valve closed
7/17/2012	10:47:01 AM	H2 valve closed
7/17/2012	10:47:01 AM	BCl3 valve closed
7/17/2012	10:47:01 AM	PH3 valve closed
7/17/2012	10:47:01 AM	SiCl4 pre valve closed
7/17/2012	10:47:01 AM	SiCl4 post valve closed
7/17/2012	10:47:01 AM	Bypass valve closed
7/17/2012	10:47:01 AM	Bubbler valve closed
7/17/2012	10:47:01 AM	Main Vac valve opened
7/17/2012	10:47:01 AM	Helium MFC set to  0.000000
7/17/2012	10:47:01 AM	H2 MFC set to  0.000000
7/17/2012	10:47:01 AM	BCl3 MFC set to  0.000000
7/17/2012	10:47:01 AM	PH3 MFC set to  0.000000
7/17/2012	10:47:01 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:47:01 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:47:01 AM	Tube furnace set to 0
7/17/2012	10:47:31 AM	H2 valve closed
7/17/2012	10:47:31 AM	BCl3 valve closed
7/17/2012	10:47:31 AM	PH3 valve closed
7/17/2012	10:47:31 AM	SiCl4 pre valve closed
7/17/2012	10:47:31 AM	SiCl4 post valve closed
7/17/2012	10:47:31 AM	Bypass valve closed
7/17/2012	10:47:31 AM	Bubbler valve closed
7/17/2012	10:47:31 AM	Helium valve opened
7/17/2012	10:47:31 AM	Main Vac valve opened
7/17/2012	10:47:31 AM	Helium MFC set to  20.000000
7/17/2012	10:47:31 AM	H2 MFC set to  0.000000
7/17/2012	10:47:31 AM	BCl3 MFC set to  0.000000
7/17/2012	10:47:31 AM	PH3 MFC set to  0.000000
7/17/2012	10:47:31 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:47:32 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:47:32 AM	Tube furnace set to 0
7/17/2012	10:48:02 AM	Helium valve closed
7/17/2012	10:48:02 AM	H2 valve closed
7/17/2012	10:48:02 AM	BCl3 valve closed
7/17/2012	10:48:02 AM	PH3 valve closed
7/17/2012	10:48:02 AM	SiCl4 pre valve closed
7/17/2012	10:48:02 AM	SiCl4 post valve closed
7/17/2012	10:48:02 AM	Bypass valve closed
7/17/2012	10:48:02 AM	Bubbler valve closed
7/17/2012	10:48:02 AM	Main Vac valve opened
7/17/2012	10:48:02 AM	Helium MFC set to  0.000000
7/17/2012	10:48:02 AM	H2 MFC set to  0.000000
7/17/2012	10:48:02 AM	BCl3 MFC set to  0.000000
7/17/2012	10:48:02 AM	PH3 MFC set to  0.000000
7/17/2012	10:48:02 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:48:02 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:48:02 AM	Tube furnace set to 0
7/17/2012	10:48:32 AM	H2 valve closed
7/17/2012	10:48:32 AM	BCl3 valve closed
7/17/2012	10:48:32 AM	PH3 valve closed
7/17/2012	10:48:32 AM	SiCl4 pre valve closed
7/17/2012	10:48:32 AM	SiCl4 post valve closed
7/17/2012	10:48:32 AM	Bypass valve closed
7/17/2012	10:48:32 AM	Bubbler valve closed
7/17/2012	10:48:32 AM	Helium valve opened
7/17/2012	10:48:32 AM	Main Vac valve opened
7/17/2012	10:48:32 AM	Helium MFC set to  20.000000
7/17/2012	10:48:32 AM	H2 MFC set to  0.000000
7/17/2012	10:48:32 AM	BCl3 MFC set to  0.000000
7/17/2012	10:48:32 AM	PH3 MFC set to  0.000000
7/17/2012	10:48:32 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:48:32 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:48:32 AM	Tube furnace set to 0
7/17/2012	10:49:02 AM	Helium valve closed
7/17/2012	10:49:02 AM	H2 valve closed
7/17/2012	10:49:02 AM	BCl3 valve closed
7/17/2012	10:49:02 AM	PH3 valve closed
7/17/2012	10:49:02 AM	SiCl4 pre valve closed
7/17/2012	10:49:02 AM	SiCl4 post valve closed
7/17/2012	10:49:02 AM	Bypass valve closed
7/17/2012	10:49:02 AM	Bubbler valve closed
7/17/2012	10:49:02 AM	Main Vac valve opened
7/17/2012	10:49:02 AM	Helium MFC set to  0.000000
7/17/2012	10:49:02 AM	H2 MFC set to  0.000000
7/17/2012	10:49:02 AM	BCl3 MFC set to  0.000000
7/17/2012	10:49:02 AM	PH3 MFC set to  0.000000
7/17/2012	10:49:02 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:49:02 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:49:02 AM	Tube furnace set to 0
7/17/2012	10:49:32 AM	H2 valve closed
7/17/2012	10:49:32 AM	BCl3 valve closed
7/17/2012	10:49:32 AM	PH3 valve closed
7/17/2012	10:49:32 AM	SiCl4 pre valve closed
7/17/2012	10:49:32 AM	SiCl4 post valve closed
7/17/2012	10:49:32 AM	Bypass valve closed
7/17/2012	10:49:32 AM	Bubbler valve closed
7/17/2012	10:49:32 AM	Helium valve opened
7/17/2012	10:49:32 AM	Main Vac valve opened
7/17/2012	10:49:32 AM	Helium MFC set to  20.000000
7/17/2012	10:49:32 AM	H2 MFC set to  0.000000
7/17/2012	10:49:32 AM	BCl3 MFC set to  0.000000
7/17/2012	10:49:32 AM	PH3 MFC set to  0.000000
7/17/2012	10:49:32 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:49:32 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:49:33 AM	Tube furnace set to 0
7/17/2012	10:50:03 AM	Helium valve closed
7/17/2012	10:50:03 AM	H2 valve closed
7/17/2012	10:50:03 AM	BCl3 valve closed
7/17/2012	10:50:03 AM	PH3 valve closed
7/17/2012	10:50:03 AM	SiCl4 pre valve closed
7/17/2012	10:50:03 AM	SiCl4 post valve closed
7/17/2012	10:50:03 AM	Bypass valve closed
7/17/2012	10:50:03 AM	Bubbler valve closed
7/17/2012	10:50:03 AM	Main Vac valve opened
7/17/2012	10:50:03 AM	Helium MFC set to  0.000000
7/17/2012	10:50:03 AM	H2 MFC set to  0.000000
7/17/2012	10:50:03 AM	BCl3 MFC set to  0.000000
7/17/2012	10:50:03 AM	PH3 MFC set to  0.000000
7/17/2012	10:50:03 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:50:03 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:50:03 AM	Tube furnace set to 0
7/17/2012	10:50:33 AM	H2 valve closed
7/17/2012	10:50:33 AM	BCl3 valve closed
7/17/2012	10:50:33 AM	PH3 valve closed
7/17/2012	10:50:33 AM	SiCl4 pre valve closed
7/17/2012	10:50:33 AM	SiCl4 post valve closed
7/17/2012	10:50:33 AM	Bypass valve closed
7/17/2012	10:50:33 AM	Bubbler valve closed
7/17/2012	10:50:33 AM	Helium valve opened
7/17/2012	10:50:33 AM	Main Vac valve opened
7/17/2012	10:50:33 AM	Helium MFC set to  20.000000
7/17/2012	10:50:33 AM	H2 MFC set to  0.000000
7/17/2012	10:50:33 AM	BCl3 MFC set to  0.000000
7/17/2012	10:50:33 AM	PH3 MFC set to  0.000000
7/17/2012	10:50:33 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:50:33 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:50:33 AM	Tube furnace set to 0
7/17/2012	10:51:03 AM	Helium valve closed
7/17/2012	10:51:03 AM	H2 valve closed
7/17/2012	10:51:03 AM	BCl3 valve closed
7/17/2012	10:51:03 AM	PH3 valve closed
7/17/2012	10:51:03 AM	SiCl4 pre valve closed
7/17/2012	10:51:03 AM	SiCl4 post valve closed
7/17/2012	10:51:03 AM	Bypass valve closed
7/17/2012	10:51:03 AM	Bubbler valve closed
7/17/2012	10:51:03 AM	Main Vac valve opened
7/17/2012	10:51:03 AM	Helium MFC set to  0.000000
7/17/2012	10:51:03 AM	H2 MFC set to  0.000000
7/17/2012	10:51:03 AM	BCl3 MFC set to  0.000000
7/17/2012	10:51:03 AM	PH3 MFC set to  0.000000
7/17/2012	10:51:03 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:51:03 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:51:03 AM	Tube furnace set to 0
7/17/2012	10:51:33 AM	H2 valve closed
7/17/2012	10:51:33 AM	BCl3 valve closed
7/17/2012	10:51:33 AM	PH3 valve closed
7/17/2012	10:51:33 AM	SiCl4 pre valve closed
7/17/2012	10:51:33 AM	SiCl4 post valve closed
7/17/2012	10:51:33 AM	Bypass valve closed
7/17/2012	10:51:33 AM	Bubbler valve closed
7/17/2012	10:51:33 AM	Helium valve opened
7/17/2012	10:51:33 AM	Main Vac valve opened
7/17/2012	10:51:33 AM	Helium MFC set to  20.000000
7/17/2012	10:51:33 AM	H2 MFC set to  0.000000
7/17/2012	10:51:33 AM	BCl3 MFC set to  0.000000
7/17/2012	10:51:33 AM	PH3 MFC set to  0.000000
7/17/2012	10:51:33 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:51:33 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:51:34 AM	Tube furnace set to 0
7/17/2012	10:52:04 AM	Helium valve closed
7/17/2012	10:52:04 AM	H2 valve closed
7/17/2012	10:52:04 AM	BCl3 valve closed
7/17/2012	10:52:04 AM	PH3 valve closed
7/17/2012	10:52:04 AM	SiCl4 pre valve closed
7/17/2012	10:52:04 AM	SiCl4 post valve closed
7/17/2012	10:52:04 AM	Bypass valve closed
7/17/2012	10:52:04 AM	Bubbler valve closed
7/17/2012	10:52:04 AM	Main Vac valve opened
7/17/2012	10:52:04 AM	Helium MFC set to  0.000000
7/17/2012	10:52:04 AM	H2 MFC set to  0.000000
7/17/2012	10:52:04 AM	BCl3 MFC set to  0.000000
7/17/2012	10:52:04 AM	PH3 MFC set to  0.000000
7/17/2012	10:52:04 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:52:04 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:52:04 AM	Tube furnace set to 0
7/17/2012	10:52:34 AM	H2 valve closed
7/17/2012	10:52:34 AM	BCl3 valve closed
7/17/2012	10:52:34 AM	PH3 valve closed
7/17/2012	10:52:34 AM	SiCl4 pre valve closed
7/17/2012	10:52:34 AM	SiCl4 post valve closed
7/17/2012	10:52:34 AM	Bypass valve closed
7/17/2012	10:52:34 AM	Bubbler valve closed
7/17/2012	10:52:34 AM	Helium valve opened
7/17/2012	10:52:34 AM	Main Vac valve opened
7/17/2012	10:52:34 AM	Helium MFC set to  20.000000
7/17/2012	10:52:34 AM	H2 MFC set to  0.000000
7/17/2012	10:52:34 AM	BCl3 MFC set to  0.000000
7/17/2012	10:52:34 AM	PH3 MFC set to  0.000000
7/17/2012	10:52:34 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:52:34 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:52:34 AM	Tube furnace set to 0
7/17/2012	10:53:04 AM	Helium valve closed
7/17/2012	10:53:04 AM	H2 valve closed
7/17/2012	10:53:04 AM	BCl3 valve closed
7/17/2012	10:53:04 AM	PH3 valve closed
7/17/2012	10:53:04 AM	SiCl4 pre valve closed
7/17/2012	10:53:04 AM	SiCl4 post valve closed
7/17/2012	10:53:04 AM	Bypass valve closed
7/17/2012	10:53:04 AM	Bubbler valve closed
7/17/2012	10:53:04 AM	Main Vac valve opened
7/17/2012	10:53:04 AM	Helium MFC set to  0.000000
7/17/2012	10:53:04 AM	H2 MFC set to  0.000000
7/17/2012	10:53:04 AM	BCl3 MFC set to  0.000000
7/17/2012	10:53:04 AM	PH3 MFC set to  0.000000
7/17/2012	10:53:04 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:53:04 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:53:04 AM	Tube furnace set to 0
7/17/2012	10:53:34 AM	H2 valve closed
7/17/2012	10:53:34 AM	BCl3 valve closed
7/17/2012	10:53:34 AM	PH3 valve closed
7/17/2012	10:53:34 AM	SiCl4 pre valve closed
7/17/2012	10:53:34 AM	SiCl4 post valve closed
7/17/2012	10:53:34 AM	Bypass valve closed
7/17/2012	10:53:34 AM	Bubbler valve closed
7/17/2012	10:53:34 AM	Helium valve opened
7/17/2012	10:53:34 AM	Main Vac valve opened
7/17/2012	10:53:34 AM	Helium MFC set to  20.000000
7/17/2012	10:53:34 AM	H2 MFC set to  0.000000
7/17/2012	10:53:34 AM	BCl3 MFC set to  0.000000
7/17/2012	10:53:34 AM	PH3 MFC set to  0.000000
7/17/2012	10:53:34 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:53:34 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:53:34 AM	Tube furnace set to 0
7/17/2012	10:54:05 AM	Helium valve closed
7/17/2012	10:54:05 AM	H2 valve closed
7/17/2012	10:54:05 AM	BCl3 valve closed
7/17/2012	10:54:05 AM	PH3 valve closed
7/17/2012	10:54:05 AM	SiCl4 pre valve closed
7/17/2012	10:54:05 AM	SiCl4 post valve closed
7/17/2012	10:54:05 AM	Bypass valve closed
7/17/2012	10:54:05 AM	Bubbler valve closed
7/17/2012	10:54:05 AM	Main Vac valve opened
7/17/2012	10:54:05 AM	Helium MFC set to  0.000000
7/17/2012	10:54:05 AM	H2 MFC set to  0.000000
7/17/2012	10:54:05 AM	BCl3 MFC set to  0.000000
7/17/2012	10:54:05 AM	PH3 MFC set to  0.000000
7/17/2012	10:54:05 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:54:05 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:54:05 AM	Tube furnace set to 0
7/17/2012	10:54:06 AM	Run finished at 10:54 AM
7/17/2012	10:54:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	10:55:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	10:55:16 AM	Recipe started at 10:55 AM
7/17/2012	10:55:16 AM	Helium valve closed
7/17/2012	10:55:16 AM	H2 valve closed
7/17/2012	10:55:16 AM	BCl3 valve closed
7/17/2012	10:55:16 AM	PH3 valve closed
7/17/2012	10:55:16 AM	SiCl4 pre valve closed
7/17/2012	10:55:16 AM	SiCl4 post valve closed
7/17/2012	10:55:16 AM	Main Vac valve closed
7/17/2012	10:55:16 AM	Bubbler valve closed
7/17/2012	10:55:16 AM	Bypass valve opened
7/17/2012	10:55:16 AM	Helium MFC set to  0.000000
7/17/2012	10:55:16 AM	H2 MFC set to  0.000000
7/17/2012	10:55:16 AM	BCl3 MFC set to  0.000000
7/17/2012	10:55:16 AM	PH3 MFC set to  0.000000
7/17/2012	10:55:16 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:55:16 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:55:16 AM	Tube furnace set to 0
7/17/2012	10:55:16 AM	Helium valve closed
7/17/2012	10:55:16 AM	H2 valve closed
7/17/2012	10:55:16 AM	BCl3 valve closed
7/17/2012	10:55:16 AM	PH3 valve closed
7/17/2012	10:55:16 AM	SiCl4 pre valve closed
7/17/2012	10:55:17 AM	SiCl4 post valve closed
7/17/2012	10:55:17 AM	Main Vac valve closed
7/17/2012	10:55:17 AM	Bubbler valve closed
7/17/2012	10:55:17 AM	Bypass valve opened
7/17/2012	10:55:17 AM	Helium MFC set to  0.000000
7/17/2012	10:55:17 AM	H2 MFC set to  0.000000
7/17/2012	10:55:17 AM	BCl3 MFC set to  0.000000
7/17/2012	10:55:17 AM	PH3 MFC set to  0.000000
7/17/2012	10:55:17 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:55:17 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:55:17 AM	Tube furnace set to 0
7/17/2012	10:55:19 AM	Helium valve closed
7/17/2012	10:55:19 AM	H2 valve closed
7/17/2012	10:55:19 AM	BCl3 valve closed
7/17/2012	10:55:19 AM	PH3 valve closed
7/17/2012	10:55:19 AM	SiCl4 pre valve closed
7/17/2012	10:55:19 AM	SiCl4 post valve closed
7/17/2012	10:55:19 AM	Bypass valve closed
7/17/2012	10:55:19 AM	Bubbler valve closed
7/17/2012	10:55:19 AM	Main Vac valve opened
7/17/2012	10:55:19 AM	Helium MFC set to  0.000000
7/17/2012	10:55:19 AM	H2 MFC set to  0.000000
7/17/2012	10:55:19 AM	BCl3 MFC set to  0.000000
7/17/2012	10:55:19 AM	PH3 MFC set to  0.000000
7/17/2012	10:55:19 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:55:19 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:55:19 AM	Tube furnace set to 0
7/17/2012	10:55:20 AM	H2 valve closed
7/17/2012	10:55:20 AM	BCl3 valve closed
7/17/2012	10:55:20 AM	PH3 valve closed
7/17/2012	10:55:20 AM	SiCl4 pre valve closed
7/17/2012	10:55:20 AM	SiCl4 post valve closed
7/17/2012	10:55:20 AM	Bypass valve closed
7/17/2012	10:55:20 AM	Bubbler valve closed
7/17/2012	10:55:20 AM	Helium valve opened
7/17/2012	10:55:20 AM	Main Vac valve opened
7/17/2012	10:55:20 AM	Helium MFC set to  20.000000
7/17/2012	10:55:20 AM	H2 MFC set to  0.000000
7/17/2012	10:55:20 AM	BCl3 MFC set to  0.000000
7/17/2012	10:55:20 AM	PH3 MFC set to  0.000000
7/17/2012	10:55:20 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:55:20 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:55:20 AM	Tube furnace set to 0
7/17/2012	10:55:50 AM	Helium valve closed
7/17/2012	10:55:50 AM	H2 valve closed
7/17/2012	10:55:50 AM	BCl3 valve closed
7/17/2012	10:55:50 AM	PH3 valve closed
7/17/2012	10:55:50 AM	SiCl4 pre valve closed
7/17/2012	10:55:50 AM	SiCl4 post valve closed
7/17/2012	10:55:50 AM	Bypass valve closed
7/17/2012	10:55:50 AM	Bubbler valve closed
7/17/2012	10:55:50 AM	Main Vac valve opened
7/17/2012	10:55:50 AM	Helium MFC set to  0.000000
7/17/2012	10:55:50 AM	H2 MFC set to  0.000000
7/17/2012	10:55:50 AM	BCl3 MFC set to  0.000000
7/17/2012	10:55:50 AM	PH3 MFC set to  0.000000
7/17/2012	10:55:50 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:55:50 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:55:50 AM	Tube furnace set to 0
7/17/2012	10:56:20 AM	H2 valve closed
7/17/2012	10:56:20 AM	BCl3 valve closed
7/17/2012	10:56:20 AM	PH3 valve closed
7/17/2012	10:56:20 AM	SiCl4 pre valve closed
7/17/2012	10:56:20 AM	SiCl4 post valve closed
7/17/2012	10:56:20 AM	Bypass valve closed
7/17/2012	10:56:20 AM	Bubbler valve closed
7/17/2012	10:56:20 AM	Helium valve opened
7/17/2012	10:56:20 AM	Main Vac valve opened
7/17/2012	10:56:20 AM	Helium MFC set to  20.000000
7/17/2012	10:56:20 AM	H2 MFC set to  0.000000
7/17/2012	10:56:20 AM	BCl3 MFC set to  0.000000
7/17/2012	10:56:20 AM	PH3 MFC set to  0.000000
7/17/2012	10:56:20 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:56:21 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:56:21 AM	Tube furnace set to 0
7/17/2012	10:56:51 AM	Helium valve closed
7/17/2012	10:56:51 AM	H2 valve closed
7/17/2012	10:56:51 AM	BCl3 valve closed
7/17/2012	10:56:51 AM	PH3 valve closed
7/17/2012	10:56:51 AM	SiCl4 pre valve closed
7/17/2012	10:56:51 AM	SiCl4 post valve closed
7/17/2012	10:56:51 AM	Bypass valve closed
7/17/2012	10:56:51 AM	Bubbler valve closed
7/17/2012	10:56:51 AM	Main Vac valve opened
7/17/2012	10:56:51 AM	Helium MFC set to  0.000000
7/17/2012	10:56:51 AM	H2 MFC set to  0.000000
7/17/2012	10:56:51 AM	BCl3 MFC set to  0.000000
7/17/2012	10:56:51 AM	PH3 MFC set to  0.000000
7/17/2012	10:56:51 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:56:51 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:56:51 AM	Tube furnace set to 0
7/17/2012	10:57:21 AM	H2 valve closed
7/17/2012	10:57:21 AM	BCl3 valve closed
7/17/2012	10:57:21 AM	PH3 valve closed
7/17/2012	10:57:21 AM	SiCl4 pre valve closed
7/17/2012	10:57:21 AM	SiCl4 post valve closed
7/17/2012	10:57:21 AM	Bypass valve closed
7/17/2012	10:57:21 AM	Bubbler valve closed
7/17/2012	10:57:21 AM	Helium valve opened
7/17/2012	10:57:21 AM	Main Vac valve opened
7/17/2012	10:57:21 AM	Helium MFC set to  20.000000
7/17/2012	10:57:21 AM	H2 MFC set to  0.000000
7/17/2012	10:57:21 AM	BCl3 MFC set to  0.000000
7/17/2012	10:57:21 AM	PH3 MFC set to  0.000000
7/17/2012	10:57:21 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:57:21 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:57:21 AM	Tube furnace set to 0
7/17/2012	10:57:51 AM	Helium valve closed
7/17/2012	10:57:51 AM	H2 valve closed
7/17/2012	10:57:51 AM	BCl3 valve closed
7/17/2012	10:57:51 AM	PH3 valve closed
7/17/2012	10:57:51 AM	SiCl4 pre valve closed
7/17/2012	10:57:51 AM	SiCl4 post valve closed
7/17/2012	10:57:51 AM	Bypass valve closed
7/17/2012	10:57:51 AM	Bubbler valve closed
7/17/2012	10:57:51 AM	Main Vac valve opened
7/17/2012	10:57:51 AM	Helium MFC set to  0.000000
7/17/2012	10:57:51 AM	H2 MFC set to  0.000000
7/17/2012	10:57:51 AM	BCl3 MFC set to  0.000000
7/17/2012	10:57:51 AM	PH3 MFC set to  0.000000
7/17/2012	10:57:51 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:57:51 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:57:51 AM	Tube furnace set to 0
7/17/2012	10:58:21 AM	H2 valve closed
7/17/2012	10:58:21 AM	BCl3 valve closed
7/17/2012	10:58:21 AM	PH3 valve closed
7/17/2012	10:58:21 AM	SiCl4 pre valve closed
7/17/2012	10:58:21 AM	SiCl4 post valve closed
7/17/2012	10:58:21 AM	Bypass valve closed
7/17/2012	10:58:21 AM	Bubbler valve closed
7/17/2012	10:58:21 AM	Helium valve opened
7/17/2012	10:58:21 AM	Main Vac valve opened
7/17/2012	10:58:21 AM	Helium MFC set to  20.000000
7/17/2012	10:58:21 AM	H2 MFC set to  0.000000
7/17/2012	10:58:21 AM	BCl3 MFC set to  0.000000
7/17/2012	10:58:21 AM	PH3 MFC set to  0.000000
7/17/2012	10:58:21 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:58:21 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:58:22 AM	Tube furnace set to 0
7/17/2012	10:58:52 AM	Helium valve closed
7/17/2012	10:58:52 AM	H2 valve closed
7/17/2012	10:58:52 AM	BCl3 valve closed
7/17/2012	10:58:52 AM	PH3 valve closed
7/17/2012	10:58:52 AM	SiCl4 pre valve closed
7/17/2012	10:58:52 AM	SiCl4 post valve closed
7/17/2012	10:58:52 AM	Bypass valve closed
7/17/2012	10:58:52 AM	Bubbler valve closed
7/17/2012	10:58:52 AM	Main Vac valve opened
7/17/2012	10:58:52 AM	Helium MFC set to  0.000000
7/17/2012	10:58:52 AM	H2 MFC set to  0.000000
7/17/2012	10:58:52 AM	BCl3 MFC set to  0.000000
7/17/2012	10:58:52 AM	PH3 MFC set to  0.000000
7/17/2012	10:58:52 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:58:52 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:58:52 AM	Tube furnace set to 0
7/17/2012	10:59:22 AM	H2 valve closed
7/17/2012	10:59:22 AM	BCl3 valve closed
7/17/2012	10:59:22 AM	PH3 valve closed
7/17/2012	10:59:22 AM	SiCl4 pre valve closed
7/17/2012	10:59:22 AM	SiCl4 post valve closed
7/17/2012	10:59:22 AM	Bypass valve closed
7/17/2012	10:59:22 AM	Bubbler valve closed
7/17/2012	10:59:22 AM	Helium valve opened
7/17/2012	10:59:22 AM	Main Vac valve opened
7/17/2012	10:59:22 AM	Helium MFC set to  20.000000
7/17/2012	10:59:22 AM	H2 MFC set to  0.000000
7/17/2012	10:59:22 AM	BCl3 MFC set to  0.000000
7/17/2012	10:59:22 AM	PH3 MFC set to  0.000000
7/17/2012	10:59:22 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:59:22 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:59:22 AM	Tube furnace set to 0
7/17/2012	10:59:52 AM	Helium valve closed
7/17/2012	10:59:52 AM	H2 valve closed
7/17/2012	10:59:52 AM	BCl3 valve closed
7/17/2012	10:59:52 AM	PH3 valve closed
7/17/2012	10:59:52 AM	SiCl4 pre valve closed
7/17/2012	10:59:52 AM	SiCl4 post valve closed
7/17/2012	10:59:52 AM	Bypass valve closed
7/17/2012	10:59:52 AM	Bubbler valve closed
7/17/2012	10:59:52 AM	Main Vac valve opened
7/17/2012	10:59:52 AM	Helium MFC set to  0.000000
7/17/2012	10:59:52 AM	H2 MFC set to  0.000000
7/17/2012	10:59:52 AM	BCl3 MFC set to  0.000000
7/17/2012	10:59:52 AM	PH3 MFC set to  0.000000
7/17/2012	10:59:52 AM	SiCl4 MFC set to  0.000000
7/17/2012	10:59:52 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	10:59:52 AM	Tube furnace set to 0
7/17/2012	11:00:22 AM	H2 valve closed
7/17/2012	11:00:22 AM	BCl3 valve closed
7/17/2012	11:00:22 AM	PH3 valve closed
7/17/2012	11:00:22 AM	SiCl4 pre valve closed
7/17/2012	11:00:22 AM	SiCl4 post valve closed
7/17/2012	11:00:22 AM	Bypass valve closed
7/17/2012	11:00:22 AM	Bubbler valve closed
7/17/2012	11:00:22 AM	Helium valve opened
7/17/2012	11:00:22 AM	Main Vac valve opened
7/17/2012	11:00:22 AM	Helium MFC set to  20.000000
7/17/2012	11:00:22 AM	H2 MFC set to  0.000000
7/17/2012	11:00:22 AM	BCl3 MFC set to  0.000000
7/17/2012	11:00:22 AM	PH3 MFC set to  0.000000
7/17/2012	11:00:22 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:00:22 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:00:23 AM	Tube furnace set to 0
7/17/2012	11:00:53 AM	Helium valve closed
7/17/2012	11:00:53 AM	H2 valve closed
7/17/2012	11:00:53 AM	BCl3 valve closed
7/17/2012	11:00:53 AM	PH3 valve closed
7/17/2012	11:00:53 AM	SiCl4 pre valve closed
7/17/2012	11:00:53 AM	SiCl4 post valve closed
7/17/2012	11:00:53 AM	Bypass valve closed
7/17/2012	11:00:53 AM	Bubbler valve closed
7/17/2012	11:00:53 AM	Main Vac valve opened
7/17/2012	11:00:53 AM	Helium MFC set to  0.000000
7/17/2012	11:00:53 AM	H2 MFC set to  0.000000
7/17/2012	11:00:53 AM	BCl3 MFC set to  0.000000
7/17/2012	11:00:53 AM	PH3 MFC set to  0.000000
7/17/2012	11:00:53 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:00:53 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:00:53 AM	Tube furnace set to 0
7/17/2012	11:01:23 AM	H2 valve closed
7/17/2012	11:01:23 AM	BCl3 valve closed
7/17/2012	11:01:23 AM	PH3 valve closed
7/17/2012	11:01:23 AM	SiCl4 pre valve closed
7/17/2012	11:01:23 AM	SiCl4 post valve closed
7/17/2012	11:01:23 AM	Bypass valve closed
7/17/2012	11:01:23 AM	Bubbler valve closed
7/17/2012	11:01:23 AM	Helium valve opened
7/17/2012	11:01:23 AM	Main Vac valve opened
7/17/2012	11:01:23 AM	Helium MFC set to  20.000000
7/17/2012	11:01:23 AM	H2 MFC set to  0.000000
7/17/2012	11:01:23 AM	BCl3 MFC set to  0.000000
7/17/2012	11:01:23 AM	PH3 MFC set to  0.000000
7/17/2012	11:01:23 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:01:23 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:01:23 AM	Tube furnace set to 0
7/17/2012	11:01:53 AM	Helium valve closed
7/17/2012	11:01:53 AM	H2 valve closed
7/17/2012	11:01:53 AM	BCl3 valve closed
7/17/2012	11:01:53 AM	PH3 valve closed
7/17/2012	11:01:53 AM	SiCl4 pre valve closed
7/17/2012	11:01:53 AM	SiCl4 post valve closed
7/17/2012	11:01:53 AM	Bypass valve closed
7/17/2012	11:01:53 AM	Bubbler valve closed
7/17/2012	11:01:53 AM	Main Vac valve opened
7/17/2012	11:01:53 AM	Helium MFC set to  0.000000
7/17/2012	11:01:53 AM	H2 MFC set to  0.000000
7/17/2012	11:01:53 AM	BCl3 MFC set to  0.000000
7/17/2012	11:01:53 AM	PH3 MFC set to  0.000000
7/17/2012	11:01:53 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:01:53 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:01:53 AM	Tube furnace set to 0
7/17/2012	11:02:23 AM	H2 valve closed
7/17/2012	11:02:23 AM	BCl3 valve closed
7/17/2012	11:02:23 AM	PH3 valve closed
7/17/2012	11:02:23 AM	SiCl4 pre valve closed
7/17/2012	11:02:23 AM	SiCl4 post valve closed
7/17/2012	11:02:23 AM	Bypass valve closed
7/17/2012	11:02:23 AM	Bubbler valve closed
7/17/2012	11:02:23 AM	Helium valve opened
7/17/2012	11:02:23 AM	Main Vac valve opened
7/17/2012	11:02:23 AM	Helium MFC set to  20.000000
7/17/2012	11:02:23 AM	H2 MFC set to  0.000000
7/17/2012	11:02:23 AM	BCl3 MFC set to  0.000000
7/17/2012	11:02:23 AM	PH3 MFC set to  0.000000
7/17/2012	11:02:23 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:02:23 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:02:23 AM	Tube furnace set to 0
7/17/2012	11:02:54 AM	Helium valve closed
7/17/2012	11:02:54 AM	H2 valve closed
7/17/2012	11:02:54 AM	BCl3 valve closed
7/17/2012	11:02:54 AM	PH3 valve closed
7/17/2012	11:02:54 AM	SiCl4 pre valve closed
7/17/2012	11:02:54 AM	SiCl4 post valve closed
7/17/2012	11:02:54 AM	Bypass valve closed
7/17/2012	11:02:54 AM	Bubbler valve closed
7/17/2012	11:02:54 AM	Main Vac valve opened
7/17/2012	11:02:54 AM	Helium MFC set to  0.000000
7/17/2012	11:02:54 AM	H2 MFC set to  0.000000
7/17/2012	11:02:54 AM	BCl3 MFC set to  0.000000
7/17/2012	11:02:54 AM	PH3 MFC set to  0.000000
7/17/2012	11:02:54 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:02:54 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:02:54 AM	Tube furnace set to 0
7/17/2012	11:03:24 AM	H2 valve closed
7/17/2012	11:03:24 AM	BCl3 valve closed
7/17/2012	11:03:24 AM	PH3 valve closed
7/17/2012	11:03:24 AM	SiCl4 pre valve closed
7/17/2012	11:03:24 AM	SiCl4 post valve closed
7/17/2012	11:03:24 AM	Bypass valve closed
7/17/2012	11:03:24 AM	Bubbler valve closed
7/17/2012	11:03:24 AM	Helium valve opened
7/17/2012	11:03:24 AM	Main Vac valve opened
7/17/2012	11:03:24 AM	Helium MFC set to  20.000000
7/17/2012	11:03:24 AM	H2 MFC set to  0.000000
7/17/2012	11:03:24 AM	BCl3 MFC set to  0.000000
7/17/2012	11:03:24 AM	PH3 MFC set to  0.000000
7/17/2012	11:03:24 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:03:24 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:03:24 AM	Tube furnace set to 0
7/17/2012	11:03:54 AM	Helium valve closed
7/17/2012	11:03:54 AM	H2 valve closed
7/17/2012	11:03:54 AM	BCl3 valve closed
7/17/2012	11:03:54 AM	PH3 valve closed
7/17/2012	11:03:54 AM	SiCl4 pre valve closed
7/17/2012	11:03:54 AM	SiCl4 post valve closed
7/17/2012	11:03:54 AM	Bypass valve closed
7/17/2012	11:03:54 AM	Bubbler valve closed
7/17/2012	11:03:54 AM	Main Vac valve opened
7/17/2012	11:03:54 AM	Helium MFC set to  0.000000
7/17/2012	11:03:54 AM	H2 MFC set to  0.000000
7/17/2012	11:03:54 AM	BCl3 MFC set to  0.000000
7/17/2012	11:03:54 AM	PH3 MFC set to  0.000000
7/17/2012	11:03:54 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:03:54 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:03:54 AM	Tube furnace set to 0
7/17/2012	11:04:24 AM	H2 valve closed
7/17/2012	11:04:24 AM	BCl3 valve closed
7/17/2012	11:04:24 AM	PH3 valve closed
7/17/2012	11:04:24 AM	SiCl4 pre valve closed
7/17/2012	11:04:24 AM	SiCl4 post valve closed
7/17/2012	11:04:24 AM	Bypass valve closed
7/17/2012	11:04:24 AM	Bubbler valve closed
7/17/2012	11:04:24 AM	Helium valve opened
7/17/2012	11:04:24 AM	Main Vac valve opened
7/17/2012	11:04:24 AM	Helium MFC set to  20.000000
7/17/2012	11:04:24 AM	H2 MFC set to  0.000000
7/17/2012	11:04:24 AM	BCl3 MFC set to  0.000000
7/17/2012	11:04:24 AM	PH3 MFC set to  0.000000
7/17/2012	11:04:24 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:04:24 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:04:24 AM	Tube furnace set to 0
7/17/2012	11:04:54 AM	Helium valve closed
7/17/2012	11:04:54 AM	H2 valve closed
7/17/2012	11:04:54 AM	BCl3 valve closed
7/17/2012	11:04:54 AM	PH3 valve closed
7/17/2012	11:04:54 AM	SiCl4 pre valve closed
7/17/2012	11:04:54 AM	SiCl4 post valve closed
7/17/2012	11:04:54 AM	Bypass valve closed
7/17/2012	11:04:54 AM	Bubbler valve closed
7/17/2012	11:04:54 AM	Main Vac valve opened
7/17/2012	11:04:54 AM	Helium MFC set to  0.000000
7/17/2012	11:04:54 AM	H2 MFC set to  0.000000
7/17/2012	11:04:55 AM	BCl3 MFC set to  0.000000
7/17/2012	11:04:55 AM	PH3 MFC set to  0.000000
7/17/2012	11:04:55 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:04:55 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:04:55 AM	Tube furnace set to 0
7/17/2012	11:04:56 AM	Run finished at 11:04 AM
7/17/2012	11:04:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	11:10:39 AM	Main Vac valve closed
7/17/2012	11:10:52 AM	Main Vac valve opened
7/17/2012	11:12:34 AM	Recipe started at 11:12 AM
7/17/2012	11:12:34 AM	Helium valve closed
7/17/2012	11:12:34 AM	H2 valve closed
7/17/2012	11:12:34 AM	BCl3 valve closed
7/17/2012	11:12:34 AM	PH3 valve closed
7/17/2012	11:12:34 AM	SiCl4 pre valve closed
7/17/2012	11:12:34 AM	SiCl4 post valve closed
7/17/2012	11:12:34 AM	Main Vac valve closed
7/17/2012	11:12:34 AM	Bypass valve closed
7/17/2012	11:12:34 AM	Bubbler valve closed
7/17/2012	11:12:34 AM	Helium MFC set to  0.000000
7/17/2012	11:12:34 AM	H2 MFC set to  0.000000
7/17/2012	11:12:34 AM	BCl3 MFC set to  0.000000
7/17/2012	11:12:34 AM	PH3 MFC set to  0.000000
7/17/2012	11:12:34 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:12:34 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:12:34 AM	Tube furnace set to 0
7/17/2012	11:12:37 AM	Helium valve closed
7/17/2012	11:12:37 AM	BCl3 valve closed
7/17/2012	11:12:37 AM	PH3 valve closed
7/17/2012	11:12:37 AM	SiCl4 pre valve closed
7/17/2012	11:12:37 AM	SiCl4 post valve closed
7/17/2012	11:12:37 AM	Main Vac valve closed
7/17/2012	11:12:37 AM	Bypass valve closed
7/17/2012	11:12:37 AM	Bubbler valve closed
7/17/2012	11:12:37 AM	H2 valve opened
7/17/2012	11:12:37 AM	Helium MFC set to  0.000000
7/17/2012	11:12:37 AM	H2 MFC set to  500.000000
7/17/2012	11:12:37 AM	BCl3 MFC set to  0.000000
7/17/2012	11:12:37 AM	PH3 MFC set to  0.000000
7/17/2012	11:12:37 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:12:37 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:12:37 AM	Tube furnace set to 0
7/17/2012	11:13:54 AM	Helium valve closed
7/17/2012	11:13:54 AM	BCl3 valve closed
7/17/2012	11:13:54 AM	PH3 valve closed
7/17/2012	11:13:54 AM	SiCl4 pre valve closed
7/17/2012	11:13:54 AM	SiCl4 post valve closed
7/17/2012	11:13:54 AM	Main Vac valve closed
7/17/2012	11:13:54 AM	Bypass valve closed
7/17/2012	11:13:54 AM	H2 valve opened
7/17/2012	11:13:54 AM	Bubbler valve opened
7/17/2012	11:13:54 AM	Helium MFC set to  0.000000
7/17/2012	11:13:54 AM	H2 MFC set to  500.000000
7/17/2012	11:13:54 AM	BCl3 MFC set to  0.000000
7/17/2012	11:13:54 AM	PH3 MFC set to  0.000000
7/17/2012	11:13:54 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:13:54 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:13:55 AM	Tube furnace set to 0
7/17/2012	11:13:56 AM	Helium valve closed
7/17/2012	11:13:56 AM	BCl3 valve closed
7/17/2012	11:13:56 AM	PH3 valve closed
7/17/2012	11:13:56 AM	SiCl4 pre valve closed
7/17/2012	11:13:56 AM	SiCl4 post valve closed
7/17/2012	11:13:56 AM	Main Vac valve closed
7/17/2012	11:13:56 AM	Bypass valve closed
7/17/2012	11:13:56 AM	H2 valve opened
7/17/2012	11:13:56 AM	Bubbler valve opened
7/17/2012	11:13:56 AM	Helium MFC set to  0.000000
7/17/2012	11:13:56 AM	H2 MFC set to  500.000000
7/17/2012	11:13:56 AM	BCl3 MFC set to  0.000000
7/17/2012	11:13:56 AM	PH3 MFC set to  0.000000
7/17/2012	11:13:56 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:13:56 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:13:56 AM	Tube furnace set to 950
7/17/2012	11:33:56 AM	Helium valve closed
7/17/2012	11:33:56 AM	PH3 valve closed
7/17/2012	11:33:56 AM	Main Vac valve closed
7/17/2012	11:33:56 AM	Bypass valve closed
7/17/2012	11:33:56 AM	H2 valve opened
7/17/2012	11:33:56 AM	BCl3 valve opened
7/17/2012	11:33:56 AM	SiCl4 pre valve opened
7/17/2012	11:33:56 AM	SiCl4 post valve opened
7/17/2012	11:33:56 AM	Bubbler valve opened
7/17/2012	11:33:56 AM	Helium MFC set to  0.000000
7/17/2012	11:33:56 AM	H2 MFC set to  500.000000
7/17/2012	11:33:56 AM	BCl3 MFC set to  1.000000
7/17/2012	11:33:56 AM	PH3 MFC set to  0.000000
7/17/2012	11:33:56 AM	SiCl4 MFC set to  65.000000
7/17/2012	11:33:56 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:33:56 AM	Tube furnace set to 950
7/17/2012	11:53:56 AM	Helium valve closed
7/17/2012	11:53:56 AM	BCl3 valve closed
7/17/2012	11:53:56 AM	PH3 valve closed
7/17/2012	11:53:56 AM	SiCl4 pre valve closed
7/17/2012	11:53:56 AM	SiCl4 post valve closed
7/17/2012	11:53:56 AM	Main Vac valve closed
7/17/2012	11:53:56 AM	Bypass valve closed
7/17/2012	11:53:56 AM	H2 valve opened
7/17/2012	11:53:56 AM	Bubbler valve opened
7/17/2012	11:53:56 AM	Helium MFC set to  0.000000
7/17/2012	11:53:56 AM	H2 MFC set to  500.000000
7/17/2012	11:53:56 AM	BCl3 MFC set to  0.000000
7/17/2012	11:53:56 AM	PH3 MFC set to  0.000000
7/17/2012	11:53:56 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:53:56 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:53:56 AM	Tube furnace set to 750
7/17/2012	11:58:56 AM	H2 valve closed
7/17/2012	11:58:56 AM	BCl3 valve closed
7/17/2012	11:58:56 AM	PH3 valve closed
7/17/2012	11:58:56 AM	SiCl4 pre valve closed
7/17/2012	11:58:56 AM	SiCl4 post valve closed
7/17/2012	11:58:56 AM	Main Vac valve closed
7/17/2012	11:58:56 AM	Bypass valve closed
7/17/2012	11:58:56 AM	Helium valve opened
7/17/2012	11:58:56 AM	Bubbler valve opened
7/17/2012	11:58:56 AM	Helium MFC set to  500.000000
7/17/2012	11:58:56 AM	H2 MFC set to  0.000000
7/17/2012	11:58:56 AM	BCl3 MFC set to  0.000000
7/17/2012	11:58:56 AM	PH3 MFC set to  0.000000
7/17/2012	11:58:56 AM	SiCl4 MFC set to  0.000000
7/17/2012	11:58:56 AM	Bypass solenoid MFC set to  0.000000
7/17/2012	11:58:57 AM	Tube furnace set to 0
7/17/2012	12:18:57 PM	Helium valve closed
7/17/2012	12:18:57 PM	H2 valve closed
7/17/2012	12:18:57 PM	BCl3 valve closed
7/17/2012	12:18:57 PM	PH3 valve closed
7/17/2012	12:18:57 PM	SiCl4 pre valve closed
7/17/2012	12:18:57 PM	SiCl4 post valve closed
7/17/2012	12:18:57 PM	Main Vac valve closed
7/17/2012	12:18:57 PM	Bypass valve closed
7/17/2012	12:18:57 PM	Bubbler valve closed
7/17/2012	12:18:57 PM	Helium MFC set to  0.000000
7/17/2012	12:18:57 PM	H2 MFC set to  0.000000
7/17/2012	12:18:57 PM	BCl3 MFC set to  0.000000
7/17/2012	12:18:57 PM	PH3 MFC set to  0.000000
7/17/2012	12:18:57 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:18:57 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:18:57 PM	Tube furnace set to 0
7/17/2012	12:18:58 PM	Run finished at 12:18 PM
7/17/2012	12:28:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	12:28:30 PM	Recipe started at 12:28 PM
7/17/2012	12:28:30 PM	Helium valve closed
7/17/2012	12:28:30 PM	H2 valve closed
7/17/2012	12:28:30 PM	BCl3 valve closed
7/17/2012	12:28:30 PM	PH3 valve closed
7/17/2012	12:28:30 PM	SiCl4 pre valve closed
7/17/2012	12:28:30 PM	SiCl4 post valve closed
7/17/2012	12:28:30 PM	Main Vac valve closed
7/17/2012	12:28:30 PM	Bypass valve closed
7/17/2012	12:28:30 PM	Bubbler valve closed
7/17/2012	12:28:30 PM	Helium MFC set to  0.000000
7/17/2012	12:28:30 PM	H2 MFC set to  0.000000
7/17/2012	12:28:30 PM	BCl3 MFC set to  0.000000
7/17/2012	12:28:30 PM	PH3 MFC set to  0.000000
7/17/2012	12:28:30 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:28:30 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:28:30 PM	Tube furnace set to 0
7/17/2012	12:28:33 PM	H2 valve closed
7/17/2012	12:28:33 PM	BCl3 valve closed
7/17/2012	12:28:33 PM	PH3 valve closed
7/17/2012	12:28:33 PM	SiCl4 pre valve closed
7/17/2012	12:28:33 PM	SiCl4 post valve closed
7/17/2012	12:28:33 PM	Main Vac valve closed
7/17/2012	12:28:33 PM	Bypass valve closed
7/17/2012	12:28:33 PM	Bubbler valve closed
7/17/2012	12:28:33 PM	Helium valve opened
7/17/2012	12:28:33 PM	Helium MFC set to  500.000000
7/17/2012	12:28:33 PM	H2 MFC set to  0.000000
7/17/2012	12:28:33 PM	BCl3 MFC set to  0.000000
7/17/2012	12:28:33 PM	PH3 MFC set to  0.000000
7/17/2012	12:28:33 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:28:33 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:28:33 PM	Tube furnace set to 0
7/17/2012	12:28:38 PM	Helium valve closed
7/17/2012	12:28:38 PM	H2 valve closed
7/17/2012	12:28:38 PM	BCl3 valve closed
7/17/2012	12:28:38 PM	PH3 valve closed
7/17/2012	12:28:38 PM	SiCl4 pre valve closed
7/17/2012	12:28:38 PM	SiCl4 post valve closed
7/17/2012	12:28:38 PM	Main Vac valve closed
7/17/2012	12:28:38 PM	Bypass valve closed
7/17/2012	12:28:38 PM	Bubbler valve closed
7/17/2012	12:28:38 PM	Helium MFC set to  0.000000
7/17/2012	12:28:38 PM	H2 MFC set to  0.000000
7/17/2012	12:28:38 PM	BCl3 MFC set to  0.000000
7/17/2012	12:28:38 PM	PH3 MFC set to  0.000000
7/17/2012	12:28:38 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:28:38 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:28:38 PM	Tube furnace set to 0
7/17/2012	12:28:39 PM	Run finished at 12:28 PM
7/17/2012	12:28:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	12:32:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	12:32:42 PM	Recipe started at 12:32 PM
7/17/2012	12:32:42 PM	Helium valve closed
7/17/2012	12:32:42 PM	H2 valve closed
7/17/2012	12:32:42 PM	BCl3 valve closed
7/17/2012	12:32:42 PM	PH3 valve closed
7/17/2012	12:32:42 PM	SiCl4 pre valve closed
7/17/2012	12:32:42 PM	SiCl4 post valve closed
7/17/2012	12:32:42 PM	Main Vac valve closed
7/17/2012	12:32:42 PM	Bubbler valve closed
7/17/2012	12:32:42 PM	Bypass valve opened
7/17/2012	12:32:42 PM	Helium MFC set to  0.000000
7/17/2012	12:32:42 PM	H2 MFC set to  0.000000
7/17/2012	12:32:42 PM	BCl3 MFC set to  0.000000
7/17/2012	12:32:42 PM	PH3 MFC set to  0.000000
7/17/2012	12:32:42 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:32:42 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:32:42 PM	Tube furnace set to 0
7/17/2012	12:33:54 PM	Helium valve closed
7/17/2012	12:33:54 PM	H2 valve closed
7/17/2012	12:33:54 PM	BCl3 valve closed
7/17/2012	12:33:54 PM	PH3 valve closed
7/17/2012	12:33:54 PM	SiCl4 pre valve closed
7/17/2012	12:33:54 PM	SiCl4 post valve closed
7/17/2012	12:33:54 PM	Main Vac valve closed
7/17/2012	12:33:54 PM	Bubbler valve closed
7/17/2012	12:33:54 PM	Bypass valve opened
7/17/2012	12:33:54 PM	Helium MFC set to  0.000000
7/17/2012	12:33:54 PM	H2 MFC set to  0.000000
7/17/2012	12:33:54 PM	BCl3 MFC set to  0.000000
7/17/2012	12:33:54 PM	PH3 MFC set to  0.000000
7/17/2012	12:33:54 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:33:54 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:33:54 PM	Tube furnace set to 0
7/17/2012	12:34:54 PM	Helium valve closed
7/17/2012	12:34:54 PM	H2 valve closed
7/17/2012	12:34:54 PM	BCl3 valve closed
7/17/2012	12:34:54 PM	PH3 valve closed
7/17/2012	12:34:54 PM	SiCl4 pre valve closed
7/17/2012	12:34:54 PM	SiCl4 post valve closed
7/17/2012	12:34:54 PM	Bypass valve closed
7/17/2012	12:34:54 PM	Bubbler valve closed
7/17/2012	12:34:54 PM	Main Vac valve opened
7/17/2012	12:34:54 PM	Helium MFC set to  0.000000
7/17/2012	12:34:54 PM	H2 MFC set to  0.000000
7/17/2012	12:34:54 PM	BCl3 MFC set to  0.000000
7/17/2012	12:34:54 PM	PH3 MFC set to  0.000000
7/17/2012	12:34:54 PM	SiCl4 MFC set to  0.000000
7/17/2012	12:34:54 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	12:34:54 PM	Tube furnace set to 0
7/17/2012	12:34:55 PM	Run finished at 12:34 PM
7/17/2012	12:34:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	1:12:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	1:12:44 PM	Recipe started at 1:12 PM
7/17/2012	1:12:44 PM	Helium valve closed
7/17/2012	1:12:44 PM	H2 valve closed
7/17/2012	1:12:44 PM	BCl3 valve closed
7/17/2012	1:12:44 PM	PH3 valve closed
7/17/2012	1:12:44 PM	SiCl4 pre valve closed
7/17/2012	1:12:44 PM	SiCl4 post valve closed
7/17/2012	1:12:44 PM	Main Vac valve closed
7/17/2012	1:12:44 PM	Bubbler valve closed
7/17/2012	1:12:44 PM	Bypass valve opened
7/17/2012	1:12:44 PM	Helium MFC set to  0.000000
7/17/2012	1:12:44 PM	H2 MFC set to  0.000000
7/17/2012	1:12:44 PM	BCl3 MFC set to  0.000000
7/17/2012	1:12:44 PM	PH3 MFC set to  0.000000
7/17/2012	1:12:44 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:12:44 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:12:44 PM	Tube furnace set to 0
7/17/2012	1:12:45 PM	Helium valve closed
7/17/2012	1:12:45 PM	H2 valve closed
7/17/2012	1:12:45 PM	BCl3 valve closed
7/17/2012	1:12:45 PM	PH3 valve closed
7/17/2012	1:12:45 PM	SiCl4 pre valve closed
7/17/2012	1:12:45 PM	SiCl4 post valve closed
7/17/2012	1:12:45 PM	Main Vac valve closed
7/17/2012	1:12:45 PM	Bubbler valve closed
7/17/2012	1:12:45 PM	Bypass valve opened
7/17/2012	1:12:45 PM	Helium MFC set to  0.000000
7/17/2012	1:12:45 PM	H2 MFC set to  0.000000
7/17/2012	1:12:45 PM	BCl3 MFC set to  0.000000
7/17/2012	1:12:45 PM	PH3 MFC set to  0.000000
7/17/2012	1:12:45 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:12:45 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:12:45 PM	Tube furnace set to 0
7/17/2012	1:12:46 PM	Helium valve closed
7/17/2012	1:12:46 PM	H2 valve closed
7/17/2012	1:12:46 PM	BCl3 valve closed
7/17/2012	1:12:46 PM	PH3 valve closed
7/17/2012	1:12:46 PM	SiCl4 pre valve closed
7/17/2012	1:12:46 PM	SiCl4 post valve closed
7/17/2012	1:12:46 PM	Bypass valve closed
7/17/2012	1:12:46 PM	Bubbler valve closed
7/17/2012	1:12:46 PM	Main Vac valve opened
7/17/2012	1:12:46 PM	Helium MFC set to  0.000000
7/17/2012	1:12:46 PM	H2 MFC set to  0.000000
7/17/2012	1:12:46 PM	BCl3 MFC set to  0.000000
7/17/2012	1:12:46 PM	PH3 MFC set to  0.000000
7/17/2012	1:12:46 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:12:46 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:12:46 PM	Tube furnace set to 0
7/17/2012	1:12:47 PM	H2 valve closed
7/17/2012	1:12:47 PM	BCl3 valve closed
7/17/2012	1:12:47 PM	PH3 valve closed
7/17/2012	1:12:47 PM	SiCl4 pre valve closed
7/17/2012	1:12:47 PM	SiCl4 post valve closed
7/17/2012	1:12:47 PM	Bypass valve closed
7/17/2012	1:12:47 PM	Bubbler valve closed
7/17/2012	1:12:47 PM	Helium valve opened
7/17/2012	1:12:47 PM	Main Vac valve opened
7/17/2012	1:12:47 PM	Helium MFC set to  20.000000
7/17/2012	1:12:47 PM	H2 MFC set to  0.000000
7/17/2012	1:12:47 PM	BCl3 MFC set to  0.000000
7/17/2012	1:12:47 PM	PH3 MFC set to  0.000000
7/17/2012	1:12:47 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:12:47 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:12:47 PM	Tube furnace set to 0
7/17/2012	1:13:17 PM	Helium valve closed
7/17/2012	1:13:17 PM	H2 valve closed
7/17/2012	1:13:17 PM	BCl3 valve closed
7/17/2012	1:13:17 PM	PH3 valve closed
7/17/2012	1:13:17 PM	SiCl4 pre valve closed
7/17/2012	1:13:17 PM	SiCl4 post valve closed
7/17/2012	1:13:17 PM	Bypass valve closed
7/17/2012	1:13:17 PM	Bubbler valve closed
7/17/2012	1:13:17 PM	Main Vac valve opened
7/17/2012	1:13:17 PM	Helium MFC set to  0.000000
7/17/2012	1:13:17 PM	H2 MFC set to  0.000000
7/17/2012	1:13:17 PM	BCl3 MFC set to  0.000000
7/17/2012	1:13:17 PM	PH3 MFC set to  0.000000
7/17/2012	1:13:17 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:13:17 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:13:17 PM	Tube furnace set to 0
7/17/2012	1:13:47 PM	H2 valve closed
7/17/2012	1:13:47 PM	BCl3 valve closed
7/17/2012	1:13:47 PM	PH3 valve closed
7/17/2012	1:13:47 PM	SiCl4 pre valve closed
7/17/2012	1:13:47 PM	SiCl4 post valve closed
7/17/2012	1:13:47 PM	Bypass valve closed
7/17/2012	1:13:47 PM	Bubbler valve closed
7/17/2012	1:13:47 PM	Helium valve opened
7/17/2012	1:13:47 PM	Main Vac valve opened
7/17/2012	1:13:47 PM	Helium MFC set to  20.000000
7/17/2012	1:13:47 PM	H2 MFC set to  0.000000
7/17/2012	1:13:47 PM	BCl3 MFC set to  0.000000
7/17/2012	1:13:47 PM	PH3 MFC set to  0.000000
7/17/2012	1:13:47 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:13:47 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:13:48 PM	Tube furnace set to 0
7/17/2012	1:14:18 PM	Helium valve closed
7/17/2012	1:14:18 PM	H2 valve closed
7/17/2012	1:14:18 PM	BCl3 valve closed
7/17/2012	1:14:18 PM	PH3 valve closed
7/17/2012	1:14:18 PM	SiCl4 pre valve closed
7/17/2012	1:14:18 PM	SiCl4 post valve closed
7/17/2012	1:14:18 PM	Bypass valve closed
7/17/2012	1:14:18 PM	Bubbler valve closed
7/17/2012	1:14:18 PM	Main Vac valve opened
7/17/2012	1:14:18 PM	Helium MFC set to  0.000000
7/17/2012	1:14:18 PM	H2 MFC set to  0.000000
7/17/2012	1:14:18 PM	BCl3 MFC set to  0.000000
7/17/2012	1:14:18 PM	PH3 MFC set to  0.000000
7/17/2012	1:14:18 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:14:18 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:14:18 PM	Tube furnace set to 0
7/17/2012	1:14:48 PM	H2 valve closed
7/17/2012	1:14:48 PM	BCl3 valve closed
7/17/2012	1:14:48 PM	PH3 valve closed
7/17/2012	1:14:48 PM	SiCl4 pre valve closed
7/17/2012	1:14:48 PM	SiCl4 post valve closed
7/17/2012	1:14:48 PM	Bypass valve closed
7/17/2012	1:14:48 PM	Bubbler valve closed
7/17/2012	1:14:48 PM	Helium valve opened
7/17/2012	1:14:48 PM	Main Vac valve opened
7/17/2012	1:14:48 PM	Helium MFC set to  20.000000
7/17/2012	1:14:48 PM	H2 MFC set to  0.000000
7/17/2012	1:14:48 PM	BCl3 MFC set to  0.000000
7/17/2012	1:14:48 PM	PH3 MFC set to  0.000000
7/17/2012	1:14:48 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:14:48 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:14:48 PM	Tube furnace set to 0
7/17/2012	1:15:18 PM	Helium valve closed
7/17/2012	1:15:18 PM	H2 valve closed
7/17/2012	1:15:18 PM	BCl3 valve closed
7/17/2012	1:15:18 PM	PH3 valve closed
7/17/2012	1:15:18 PM	SiCl4 pre valve closed
7/17/2012	1:15:18 PM	SiCl4 post valve closed
7/17/2012	1:15:18 PM	Bypass valve closed
7/17/2012	1:15:18 PM	Bubbler valve closed
7/17/2012	1:15:18 PM	Main Vac valve opened
7/17/2012	1:15:18 PM	Helium MFC set to  0.000000
7/17/2012	1:15:18 PM	H2 MFC set to  0.000000
7/17/2012	1:15:18 PM	BCl3 MFC set to  0.000000
7/17/2012	1:15:18 PM	PH3 MFC set to  0.000000
7/17/2012	1:15:18 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:15:18 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:15:18 PM	Tube furnace set to 0
7/17/2012	1:15:48 PM	H2 valve closed
7/17/2012	1:15:48 PM	BCl3 valve closed
7/17/2012	1:15:48 PM	PH3 valve closed
7/17/2012	1:15:48 PM	SiCl4 pre valve closed
7/17/2012	1:15:48 PM	SiCl4 post valve closed
7/17/2012	1:15:48 PM	Bypass valve closed
7/17/2012	1:15:48 PM	Bubbler valve closed
7/17/2012	1:15:48 PM	Helium valve opened
7/17/2012	1:15:48 PM	Main Vac valve opened
7/17/2012	1:15:48 PM	Helium MFC set to  20.000000
7/17/2012	1:15:48 PM	H2 MFC set to  0.000000
7/17/2012	1:15:48 PM	BCl3 MFC set to  0.000000
7/17/2012	1:15:48 PM	PH3 MFC set to  0.000000
7/17/2012	1:15:48 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:15:48 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:15:49 PM	Tube furnace set to 0
7/17/2012	1:16:19 PM	Helium valve closed
7/17/2012	1:16:19 PM	H2 valve closed
7/17/2012	1:16:19 PM	BCl3 valve closed
7/17/2012	1:16:19 PM	PH3 valve closed
7/17/2012	1:16:19 PM	SiCl4 pre valve closed
7/17/2012	1:16:19 PM	SiCl4 post valve closed
7/17/2012	1:16:19 PM	Bypass valve closed
7/17/2012	1:16:19 PM	Bubbler valve closed
7/17/2012	1:16:19 PM	Main Vac valve opened
7/17/2012	1:16:19 PM	Helium MFC set to  0.000000
7/17/2012	1:16:19 PM	H2 MFC set to  0.000000
7/17/2012	1:16:19 PM	BCl3 MFC set to  0.000000
7/17/2012	1:16:19 PM	PH3 MFC set to  0.000000
7/17/2012	1:16:19 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:16:19 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:16:19 PM	Tube furnace set to 0
7/17/2012	1:16:49 PM	H2 valve closed
7/17/2012	1:16:49 PM	BCl3 valve closed
7/17/2012	1:16:49 PM	PH3 valve closed
7/17/2012	1:16:49 PM	SiCl4 pre valve closed
7/17/2012	1:16:49 PM	SiCl4 post valve closed
7/17/2012	1:16:49 PM	Bypass valve closed
7/17/2012	1:16:49 PM	Bubbler valve closed
7/17/2012	1:16:49 PM	Helium valve opened
7/17/2012	1:16:49 PM	Main Vac valve opened
7/17/2012	1:16:49 PM	Helium MFC set to  20.000000
7/17/2012	1:16:49 PM	H2 MFC set to  0.000000
7/17/2012	1:16:49 PM	BCl3 MFC set to  0.000000
7/17/2012	1:16:49 PM	PH3 MFC set to  0.000000
7/17/2012	1:16:49 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:16:49 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:16:49 PM	Tube furnace set to 0
7/17/2012	1:17:19 PM	Helium valve closed
7/17/2012	1:17:19 PM	H2 valve closed
7/17/2012	1:17:19 PM	BCl3 valve closed
7/17/2012	1:17:19 PM	PH3 valve closed
7/17/2012	1:17:19 PM	SiCl4 pre valve closed
7/17/2012	1:17:19 PM	SiCl4 post valve closed
7/17/2012	1:17:19 PM	Bypass valve closed
7/17/2012	1:17:19 PM	Bubbler valve closed
7/17/2012	1:17:19 PM	Main Vac valve opened
7/17/2012	1:17:19 PM	Helium MFC set to  0.000000
7/17/2012	1:17:19 PM	H2 MFC set to  0.000000
7/17/2012	1:17:19 PM	BCl3 MFC set to  0.000000
7/17/2012	1:17:19 PM	PH3 MFC set to  0.000000
7/17/2012	1:17:19 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:17:19 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:17:19 PM	Tube furnace set to 0
7/17/2012	1:17:49 PM	H2 valve closed
7/17/2012	1:17:49 PM	BCl3 valve closed
7/17/2012	1:17:49 PM	PH3 valve closed
7/17/2012	1:17:49 PM	SiCl4 pre valve closed
7/17/2012	1:17:49 PM	SiCl4 post valve closed
7/17/2012	1:17:49 PM	Bypass valve closed
7/17/2012	1:17:49 PM	Bubbler valve closed
7/17/2012	1:17:49 PM	Helium valve opened
7/17/2012	1:17:49 PM	Main Vac valve opened
7/17/2012	1:17:49 PM	Helium MFC set to  20.000000
7/17/2012	1:17:49 PM	H2 MFC set to  0.000000
7/17/2012	1:17:49 PM	BCl3 MFC set to  0.000000
7/17/2012	1:17:49 PM	PH3 MFC set to  0.000000
7/17/2012	1:17:49 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:17:49 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:17:49 PM	Tube furnace set to 0
7/17/2012	1:18:20 PM	Helium valve closed
7/17/2012	1:18:20 PM	H2 valve closed
7/17/2012	1:18:20 PM	BCl3 valve closed
7/17/2012	1:18:20 PM	PH3 valve closed
7/17/2012	1:18:20 PM	SiCl4 pre valve closed
7/17/2012	1:18:20 PM	SiCl4 post valve closed
7/17/2012	1:18:20 PM	Bypass valve closed
7/17/2012	1:18:20 PM	Bubbler valve closed
7/17/2012	1:18:20 PM	Main Vac valve opened
7/17/2012	1:18:20 PM	Helium MFC set to  0.000000
7/17/2012	1:18:20 PM	H2 MFC set to  0.000000
7/17/2012	1:18:20 PM	BCl3 MFC set to  0.000000
7/17/2012	1:18:20 PM	PH3 MFC set to  0.000000
7/17/2012	1:18:20 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:18:20 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:18:20 PM	Tube furnace set to 0
7/17/2012	1:18:50 PM	H2 valve closed
7/17/2012	1:18:50 PM	BCl3 valve closed
7/17/2012	1:18:50 PM	PH3 valve closed
7/17/2012	1:18:50 PM	SiCl4 pre valve closed
7/17/2012	1:18:50 PM	SiCl4 post valve closed
7/17/2012	1:18:50 PM	Bypass valve closed
7/17/2012	1:18:50 PM	Bubbler valve closed
7/17/2012	1:18:50 PM	Helium valve opened
7/17/2012	1:18:50 PM	Main Vac valve opened
7/17/2012	1:18:50 PM	Helium MFC set to  20.000000
7/17/2012	1:18:50 PM	H2 MFC set to  0.000000
7/17/2012	1:18:50 PM	BCl3 MFC set to  0.000000
7/17/2012	1:18:50 PM	PH3 MFC set to  0.000000
7/17/2012	1:18:50 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:18:50 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:18:50 PM	Tube furnace set to 0
7/17/2012	1:19:20 PM	Helium valve closed
7/17/2012	1:19:20 PM	H2 valve closed
7/17/2012	1:19:20 PM	BCl3 valve closed
7/17/2012	1:19:20 PM	PH3 valve closed
7/17/2012	1:19:20 PM	SiCl4 pre valve closed
7/17/2012	1:19:20 PM	SiCl4 post valve closed
7/17/2012	1:19:20 PM	Bypass valve closed
7/17/2012	1:19:20 PM	Bubbler valve closed
7/17/2012	1:19:20 PM	Main Vac valve opened
7/17/2012	1:19:20 PM	Helium MFC set to  0.000000
7/17/2012	1:19:20 PM	H2 MFC set to  0.000000
7/17/2012	1:19:20 PM	BCl3 MFC set to  0.000000
7/17/2012	1:19:20 PM	PH3 MFC set to  0.000000
7/17/2012	1:19:20 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:19:20 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:19:20 PM	Tube furnace set to 0
7/17/2012	1:19:50 PM	H2 valve closed
7/17/2012	1:19:50 PM	BCl3 valve closed
7/17/2012	1:19:50 PM	PH3 valve closed
7/17/2012	1:19:50 PM	SiCl4 pre valve closed
7/17/2012	1:19:50 PM	SiCl4 post valve closed
7/17/2012	1:19:50 PM	Bypass valve closed
7/17/2012	1:19:50 PM	Bubbler valve closed
7/17/2012	1:19:50 PM	Helium valve opened
7/17/2012	1:19:50 PM	Main Vac valve opened
7/17/2012	1:19:50 PM	Helium MFC set to  20.000000
7/17/2012	1:19:50 PM	H2 MFC set to  0.000000
7/17/2012	1:19:50 PM	BCl3 MFC set to  0.000000
7/17/2012	1:19:50 PM	PH3 MFC set to  0.000000
7/17/2012	1:19:50 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:19:50 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:19:50 PM	Tube furnace set to 0
7/17/2012	1:20:20 PM	Helium valve closed
7/17/2012	1:20:20 PM	H2 valve closed
7/17/2012	1:20:20 PM	BCl3 valve closed
7/17/2012	1:20:20 PM	PH3 valve closed
7/17/2012	1:20:20 PM	SiCl4 pre valve closed
7/17/2012	1:20:20 PM	SiCl4 post valve closed
7/17/2012	1:20:20 PM	Bypass valve closed
7/17/2012	1:20:20 PM	Bubbler valve closed
7/17/2012	1:20:21 PM	Main Vac valve opened
7/17/2012	1:20:21 PM	Helium MFC set to  0.000000
7/17/2012	1:20:21 PM	H2 MFC set to  0.000000
7/17/2012	1:20:21 PM	BCl3 MFC set to  0.000000
7/17/2012	1:20:21 PM	PH3 MFC set to  0.000000
7/17/2012	1:20:21 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:20:21 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:20:21 PM	Tube furnace set to 0
7/17/2012	1:20:51 PM	H2 valve closed
7/17/2012	1:20:51 PM	BCl3 valve closed
7/17/2012	1:20:51 PM	PH3 valve closed
7/17/2012	1:20:51 PM	SiCl4 pre valve closed
7/17/2012	1:20:51 PM	SiCl4 post valve closed
7/17/2012	1:20:51 PM	Bypass valve closed
7/17/2012	1:20:51 PM	Bubbler valve closed
7/17/2012	1:20:51 PM	Helium valve opened
7/17/2012	1:20:51 PM	Main Vac valve opened
7/17/2012	1:20:51 PM	Helium MFC set to  20.000000
7/17/2012	1:20:51 PM	H2 MFC set to  0.000000
7/17/2012	1:20:51 PM	BCl3 MFC set to  0.000000
7/17/2012	1:20:51 PM	PH3 MFC set to  0.000000
7/17/2012	1:20:51 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:20:51 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:20:51 PM	Tube furnace set to 0
7/17/2012	1:21:21 PM	Helium valve closed
7/17/2012	1:21:21 PM	H2 valve closed
7/17/2012	1:21:21 PM	BCl3 valve closed
7/17/2012	1:21:21 PM	PH3 valve closed
7/17/2012	1:21:21 PM	SiCl4 pre valve closed
7/17/2012	1:21:21 PM	SiCl4 post valve closed
7/17/2012	1:21:21 PM	Bypass valve closed
7/17/2012	1:21:21 PM	Bubbler valve closed
7/17/2012	1:21:21 PM	Main Vac valve opened
7/17/2012	1:21:21 PM	Helium MFC set to  0.000000
7/17/2012	1:21:21 PM	H2 MFC set to  0.000000
7/17/2012	1:21:21 PM	BCl3 MFC set to  0.000000
7/17/2012	1:21:21 PM	PH3 MFC set to  0.000000
7/17/2012	1:21:21 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:21:21 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:21:21 PM	Tube furnace set to 0
7/17/2012	1:21:51 PM	H2 valve closed
7/17/2012	1:21:51 PM	BCl3 valve closed
7/17/2012	1:21:51 PM	PH3 valve closed
7/17/2012	1:21:51 PM	SiCl4 pre valve closed
7/17/2012	1:21:51 PM	SiCl4 post valve closed
7/17/2012	1:21:51 PM	Bypass valve closed
7/17/2012	1:21:51 PM	Bubbler valve closed
7/17/2012	1:21:51 PM	Helium valve opened
7/17/2012	1:21:51 PM	Main Vac valve opened
7/17/2012	1:21:51 PM	Helium MFC set to  20.000000
7/17/2012	1:21:51 PM	H2 MFC set to  0.000000
7/17/2012	1:21:51 PM	BCl3 MFC set to  0.000000
7/17/2012	1:21:51 PM	PH3 MFC set to  0.000000
7/17/2012	1:21:51 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:21:51 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:21:51 PM	Tube furnace set to 0
7/17/2012	1:22:21 PM	Helium valve closed
7/17/2012	1:22:21 PM	H2 valve closed
7/17/2012	1:22:21 PM	BCl3 valve closed
7/17/2012	1:22:21 PM	PH3 valve closed
7/17/2012	1:22:21 PM	SiCl4 pre valve closed
7/17/2012	1:22:21 PM	SiCl4 post valve closed
7/17/2012	1:22:21 PM	Bypass valve closed
7/17/2012	1:22:21 PM	Bubbler valve closed
7/17/2012	1:22:21 PM	Main Vac valve opened
7/17/2012	1:22:21 PM	Helium MFC set to  0.000000
7/17/2012	1:22:21 PM	H2 MFC set to  0.000000
7/17/2012	1:22:21 PM	BCl3 MFC set to  0.000000
7/17/2012	1:22:21 PM	PH3 MFC set to  0.000000
7/17/2012	1:22:21 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:22:21 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:22:22 PM	Tube furnace set to 0
7/17/2012	1:22:23 PM	Run finished at 1:22 PM
7/17/2012	1:22:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	1:25:53 PM	Main Vac valve closed
7/17/2012	1:26:07 PM	Main Vac valve opened
7/17/2012	1:27:41 PM	Recipe started at 1:27 PM
7/17/2012	1:27:41 PM	Helium valve closed
7/17/2012	1:27:41 PM	H2 valve closed
7/17/2012	1:27:41 PM	BCl3 valve closed
7/17/2012	1:27:41 PM	PH3 valve closed
7/17/2012	1:27:41 PM	SiCl4 pre valve closed
7/17/2012	1:27:41 PM	SiCl4 post valve closed
7/17/2012	1:27:41 PM	Main Vac valve closed
7/17/2012	1:27:41 PM	Bypass valve closed
7/17/2012	1:27:41 PM	Bubbler valve closed
7/17/2012	1:27:41 PM	Helium MFC set to  0.000000
7/17/2012	1:27:41 PM	H2 MFC set to  0.000000
7/17/2012	1:27:41 PM	BCl3 MFC set to  0.000000
7/17/2012	1:27:41 PM	PH3 MFC set to  0.000000
7/17/2012	1:27:41 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:27:41 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:27:41 PM	Tube furnace set to 0
7/17/2012	1:27:44 PM	Helium valve closed
7/17/2012	1:27:44 PM	BCl3 valve closed
7/17/2012	1:27:44 PM	PH3 valve closed
7/17/2012	1:27:44 PM	SiCl4 pre valve closed
7/17/2012	1:27:44 PM	SiCl4 post valve closed
7/17/2012	1:27:44 PM	Main Vac valve closed
7/17/2012	1:27:44 PM	Bypass valve closed
7/17/2012	1:27:44 PM	Bubbler valve closed
7/17/2012	1:27:44 PM	H2 valve opened
7/17/2012	1:27:44 PM	Helium MFC set to  0.000000
7/17/2012	1:27:44 PM	H2 MFC set to  500.000000
7/17/2012	1:27:44 PM	BCl3 MFC set to  0.000000
7/17/2012	1:27:44 PM	PH3 MFC set to  0.000000
7/17/2012	1:27:44 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:27:44 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:27:44 PM	Tube furnace set to 0
7/17/2012	1:29:01 PM	Helium valve closed
7/17/2012	1:29:01 PM	BCl3 valve closed
7/17/2012	1:29:01 PM	PH3 valve closed
7/17/2012	1:29:01 PM	SiCl4 pre valve closed
7/17/2012	1:29:01 PM	SiCl4 post valve closed
7/17/2012	1:29:01 PM	Main Vac valve closed
7/17/2012	1:29:01 PM	Bypass valve closed
7/17/2012	1:29:01 PM	H2 valve opened
7/17/2012	1:29:01 PM	Bubbler valve opened
7/17/2012	1:29:01 PM	Helium MFC set to  0.000000
7/17/2012	1:29:01 PM	H2 MFC set to  500.000000
7/17/2012	1:29:01 PM	BCl3 MFC set to  0.000000
7/17/2012	1:29:01 PM	PH3 MFC set to  0.000000
7/17/2012	1:29:01 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:29:01 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:29:01 PM	Tube furnace set to 0
7/17/2012	1:29:02 PM	Helium valve closed
7/17/2012	1:29:02 PM	BCl3 valve closed
7/17/2012	1:29:02 PM	PH3 valve closed
7/17/2012	1:29:02 PM	SiCl4 pre valve closed
7/17/2012	1:29:02 PM	SiCl4 post valve closed
7/17/2012	1:29:02 PM	Main Vac valve closed
7/17/2012	1:29:02 PM	Bypass valve closed
7/17/2012	1:29:02 PM	H2 valve opened
7/17/2012	1:29:02 PM	Bubbler valve opened
7/17/2012	1:29:02 PM	Helium MFC set to  0.000000
7/17/2012	1:29:02 PM	H2 MFC set to  500.000000
7/17/2012	1:29:02 PM	BCl3 MFC set to  0.000000
7/17/2012	1:29:02 PM	PH3 MFC set to  0.000000
7/17/2012	1:29:02 PM	SiCl4 MFC set to  0.000000
7/17/2012	1:29:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:29:02 PM	Tube furnace set to 950
7/17/2012	1:49:02 PM	Helium valve closed
7/17/2012	1:49:02 PM	PH3 valve closed
7/17/2012	1:49:02 PM	Main Vac valve closed
7/17/2012	1:49:02 PM	Bypass valve closed
7/17/2012	1:49:02 PM	H2 valve opened
7/17/2012	1:49:02 PM	BCl3 valve opened
7/17/2012	1:49:02 PM	SiCl4 pre valve opened
7/17/2012	1:49:02 PM	SiCl4 post valve opened
7/17/2012	1:49:02 PM	Bubbler valve opened
7/17/2012	1:49:02 PM	Helium MFC set to  0.000000
7/17/2012	1:49:02 PM	H2 MFC set to  500.000000
7/17/2012	1:49:02 PM	BCl3 MFC set to  1.000000
7/17/2012	1:49:02 PM	PH3 MFC set to  0.000000
7/17/2012	1:49:02 PM	SiCl4 MFC set to  70.000000
7/17/2012	1:49:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	1:49:03 PM	Tube furnace set to 950
7/17/2012	2:09:03 PM	Helium valve closed
7/17/2012	2:09:03 PM	BCl3 valve closed
7/17/2012	2:09:03 PM	PH3 valve closed
7/17/2012	2:09:03 PM	SiCl4 pre valve closed
7/17/2012	2:09:03 PM	SiCl4 post valve closed
7/17/2012	2:09:03 PM	Main Vac valve closed
7/17/2012	2:09:03 PM	Bypass valve closed
7/17/2012	2:09:03 PM	H2 valve opened
7/17/2012	2:09:03 PM	Bubbler valve opened
7/17/2012	2:09:03 PM	Helium MFC set to  0.000000
7/17/2012	2:09:03 PM	H2 MFC set to  500.000000
7/17/2012	2:09:03 PM	BCl3 MFC set to  0.000000
7/17/2012	2:09:03 PM	PH3 MFC set to  0.000000
7/17/2012	2:09:03 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:09:03 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:09:03 PM	Tube furnace set to 750
7/17/2012	2:14:03 PM	H2 valve closed
7/17/2012	2:14:03 PM	BCl3 valve closed
7/17/2012	2:14:03 PM	PH3 valve closed
7/17/2012	2:14:03 PM	SiCl4 pre valve closed
7/17/2012	2:14:03 PM	SiCl4 post valve closed
7/17/2012	2:14:03 PM	Main Vac valve closed
7/17/2012	2:14:03 PM	Bypass valve closed
7/17/2012	2:14:03 PM	Helium valve opened
7/17/2012	2:14:03 PM	Bubbler valve opened
7/17/2012	2:14:03 PM	Helium MFC set to  500.000000
7/17/2012	2:14:03 PM	H2 MFC set to  0.000000
7/17/2012	2:14:03 PM	BCl3 MFC set to  0.000000
7/17/2012	2:14:03 PM	PH3 MFC set to  0.000000
7/17/2012	2:14:03 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:14:03 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:14:03 PM	Tube furnace set to 0
7/17/2012	2:33:50 PM	Helium valve closed
7/17/2012	2:33:50 PM	H2 valve closed
7/17/2012	2:33:50 PM	BCl3 valve closed
7/17/2012	2:33:50 PM	PH3 valve closed
7/17/2012	2:33:50 PM	SiCl4 pre valve closed
7/17/2012	2:33:50 PM	SiCl4 post valve closed
7/17/2012	2:33:50 PM	Main Vac valve closed
7/17/2012	2:33:50 PM	Bypass valve closed
7/17/2012	2:33:50 PM	Bubbler valve closed
7/17/2012	2:33:50 PM	Helium MFC set to  0.000000
7/17/2012	2:33:50 PM	H2 MFC set to  0.000000
7/17/2012	2:33:50 PM	BCl3 MFC set to  0.000000
7/17/2012	2:33:50 PM	PH3 MFC set to  0.000000
7/17/2012	2:33:50 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:33:50 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:33:51 PM	Tube furnace set to 0
7/17/2012	2:33:52 PM	Run finished at 2:33 PM
7/17/2012	2:33:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	2:33:56 PM	Recipe started at 2:33 PM
7/17/2012	2:33:56 PM	Helium valve closed
7/17/2012	2:33:56 PM	H2 valve closed
7/17/2012	2:33:56 PM	BCl3 valve closed
7/17/2012	2:33:56 PM	PH3 valve closed
7/17/2012	2:33:56 PM	SiCl4 pre valve closed
7/17/2012	2:33:56 PM	SiCl4 post valve closed
7/17/2012	2:33:56 PM	Main Vac valve closed
7/17/2012	2:33:56 PM	Bypass valve closed
7/17/2012	2:33:56 PM	Bubbler valve closed
7/17/2012	2:33:56 PM	Helium MFC set to  0.000000
7/17/2012	2:33:56 PM	H2 MFC set to  0.000000
7/17/2012	2:33:56 PM	BCl3 MFC set to  0.000000
7/17/2012	2:33:56 PM	PH3 MFC set to  0.000000
7/17/2012	2:33:56 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:33:56 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:33:56 PM	Tube furnace set to 0
7/17/2012	2:33:59 PM	H2 valve closed
7/17/2012	2:33:59 PM	BCl3 valve closed
7/17/2012	2:33:59 PM	PH3 valve closed
7/17/2012	2:33:59 PM	SiCl4 pre valve closed
7/17/2012	2:33:59 PM	SiCl4 post valve closed
7/17/2012	2:33:59 PM	Main Vac valve closed
7/17/2012	2:33:59 PM	Bypass valve closed
7/17/2012	2:33:59 PM	Bubbler valve closed
7/17/2012	2:33:59 PM	Helium valve opened
7/17/2012	2:33:59 PM	Helium MFC set to  500.000000
7/17/2012	2:33:59 PM	H2 MFC set to  0.000000
7/17/2012	2:33:59 PM	BCl3 MFC set to  0.000000
7/17/2012	2:33:59 PM	PH3 MFC set to  0.000000
7/17/2012	2:33:59 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:33:59 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:33:59 PM	Tube furnace set to 0
7/17/2012	2:33:59 PM	Helium valve closed
7/17/2012	2:33:59 PM	H2 valve closed
7/17/2012	2:33:59 PM	BCl3 valve closed
7/17/2012	2:33:59 PM	PH3 valve closed
7/17/2012	2:33:59 PM	SiCl4 pre valve closed
7/17/2012	2:33:59 PM	SiCl4 post valve closed
7/17/2012	2:33:59 PM	Main Vac valve closed
7/17/2012	2:33:59 PM	Bypass valve closed
7/17/2012	2:33:59 PM	Bubbler valve closed
7/17/2012	2:33:59 PM	Helium MFC set to  0.000000
7/17/2012	2:33:59 PM	H2 MFC set to  0.000000
7/17/2012	2:33:59 PM	BCl3 MFC set to  0.000000
7/17/2012	2:34:00 PM	PH3 MFC set to  0.000000
7/17/2012	2:34:00 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:34:00 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:34:00 PM	Tube furnace set to 0
7/17/2012	2:34:01 PM	Run finished at 2:34 PM
7/17/2012	2:34:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	2:37:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	2:37:58 PM	Recipe started at 2:37 PM
7/17/2012	2:37:58 PM	Helium valve closed
7/17/2012	2:37:58 PM	H2 valve closed
7/17/2012	2:37:58 PM	BCl3 valve closed
7/17/2012	2:37:58 PM	PH3 valve closed
7/17/2012	2:37:58 PM	SiCl4 pre valve closed
7/17/2012	2:37:58 PM	SiCl4 post valve closed
7/17/2012	2:37:58 PM	Main Vac valve closed
7/17/2012	2:37:58 PM	Bubbler valve closed
7/17/2012	2:37:58 PM	Bypass valve opened
7/17/2012	2:37:58 PM	Helium MFC set to  0.000000
7/17/2012	2:37:58 PM	H2 MFC set to  0.000000
7/17/2012	2:37:58 PM	BCl3 MFC set to  0.000000
7/17/2012	2:37:58 PM	PH3 MFC set to  0.000000
7/17/2012	2:37:58 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:37:58 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:37:58 PM	Tube furnace set to 0
7/17/2012	2:39:10 PM	Helium valve closed
7/17/2012	2:39:10 PM	H2 valve closed
7/17/2012	2:39:10 PM	BCl3 valve closed
7/17/2012	2:39:10 PM	PH3 valve closed
7/17/2012	2:39:10 PM	SiCl4 pre valve closed
7/17/2012	2:39:10 PM	SiCl4 post valve closed
7/17/2012	2:39:10 PM	Main Vac valve closed
7/17/2012	2:39:10 PM	Bubbler valve closed
7/17/2012	2:39:10 PM	Bypass valve opened
7/17/2012	2:39:10 PM	Helium MFC set to  0.000000
7/17/2012	2:39:10 PM	H2 MFC set to  0.000000
7/17/2012	2:39:10 PM	BCl3 MFC set to  0.000000
7/17/2012	2:39:10 PM	PH3 MFC set to  0.000000
7/17/2012	2:39:10 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:39:10 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:39:10 PM	Tube furnace set to 0
7/17/2012	2:40:10 PM	Helium valve closed
7/17/2012	2:40:10 PM	H2 valve closed
7/17/2012	2:40:10 PM	BCl3 valve closed
7/17/2012	2:40:10 PM	PH3 valve closed
7/17/2012	2:40:10 PM	SiCl4 pre valve closed
7/17/2012	2:40:10 PM	SiCl4 post valve closed
7/17/2012	2:40:10 PM	Bypass valve closed
7/17/2012	2:40:10 PM	Bubbler valve closed
7/17/2012	2:40:10 PM	Main Vac valve opened
7/17/2012	2:40:10 PM	Helium MFC set to  0.000000
7/17/2012	2:40:10 PM	H2 MFC set to  0.000000
7/17/2012	2:40:10 PM	BCl3 MFC set to  0.000000
7/17/2012	2:40:10 PM	PH3 MFC set to  0.000000
7/17/2012	2:40:10 PM	SiCl4 MFC set to  0.000000
7/17/2012	2:40:10 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	2:40:10 PM	Tube furnace set to 0
7/17/2012	2:40:11 PM	Run finished at 2:40 PM
7/17/2012	2:40:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	2:59:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	3:00:05 PM	Recipe started at 2:59 PM
7/17/2012	3:00:05 PM	Helium valve closed
7/17/2012	3:00:05 PM	H2 valve closed
7/17/2012	3:00:05 PM	BCl3 valve closed
7/17/2012	3:00:05 PM	PH3 valve closed
7/17/2012	3:00:05 PM	SiCl4 pre valve closed
7/17/2012	3:00:05 PM	SiCl4 post valve closed
7/17/2012	3:00:05 PM	Main Vac valve closed
7/17/2012	3:00:05 PM	Bubbler valve closed
7/17/2012	3:00:05 PM	Bypass valve opened
7/17/2012	3:00:05 PM	Helium MFC set to  0.000000
7/17/2012	3:00:05 PM	H2 MFC set to  0.000000
7/17/2012	3:00:05 PM	BCl3 MFC set to  0.000000
7/17/2012	3:00:05 PM	PH3 MFC set to  0.000000
7/17/2012	3:00:05 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:00:05 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:00:05 PM	Tube furnace set to 0
7/17/2012	3:00:05 PM	Helium valve closed
7/17/2012	3:00:05 PM	H2 valve closed
7/17/2012	3:00:05 PM	BCl3 valve closed
7/17/2012	3:00:05 PM	PH3 valve closed
7/17/2012	3:00:05 PM	SiCl4 pre valve closed
7/17/2012	3:00:05 PM	SiCl4 post valve closed
7/17/2012	3:00:05 PM	Main Vac valve closed
7/17/2012	3:00:05 PM	Bubbler valve closed
7/17/2012	3:00:05 PM	Bypass valve opened
7/17/2012	3:00:05 PM	Helium MFC set to  0.000000
7/17/2012	3:00:05 PM	H2 MFC set to  0.000000
7/17/2012	3:00:05 PM	BCl3 MFC set to  0.000000
7/17/2012	3:00:05 PM	PH3 MFC set to  0.000000
7/17/2012	3:00:05 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:00:05 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:00:06 PM	Tube furnace set to 0
7/17/2012	3:00:07 PM	Helium valve closed
7/17/2012	3:00:07 PM	H2 valve closed
7/17/2012	3:00:07 PM	BCl3 valve closed
7/17/2012	3:00:07 PM	PH3 valve closed
7/17/2012	3:00:07 PM	SiCl4 pre valve closed
7/17/2012	3:00:07 PM	SiCl4 post valve closed
7/17/2012	3:00:07 PM	Bypass valve closed
7/17/2012	3:00:07 PM	Bubbler valve closed
7/17/2012	3:00:07 PM	Main Vac valve opened
7/17/2012	3:00:07 PM	Helium MFC set to  0.000000
7/17/2012	3:00:07 PM	H2 MFC set to  0.000000
7/17/2012	3:00:07 PM	BCl3 MFC set to  0.000000
7/17/2012	3:00:07 PM	PH3 MFC set to  0.000000
7/17/2012	3:00:07 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:00:07 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:00:07 PM	Tube furnace set to 0
7/17/2012	3:00:07 PM	H2 valve closed
7/17/2012	3:00:07 PM	BCl3 valve closed
7/17/2012	3:00:07 PM	PH3 valve closed
7/17/2012	3:00:07 PM	SiCl4 pre valve closed
7/17/2012	3:00:07 PM	SiCl4 post valve closed
7/17/2012	3:00:07 PM	Bypass valve closed
7/17/2012	3:00:07 PM	Bubbler valve closed
7/17/2012	3:00:07 PM	Helium valve opened
7/17/2012	3:00:07 PM	Main Vac valve opened
7/17/2012	3:00:07 PM	Helium MFC set to  20.000000
7/17/2012	3:00:07 PM	H2 MFC set to  0.000000
7/17/2012	3:00:07 PM	BCl3 MFC set to  0.000000
7/17/2012	3:00:07 PM	PH3 MFC set to  0.000000
7/17/2012	3:00:07 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:00:07 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:00:07 PM	Tube furnace set to 0
7/17/2012	3:00:37 PM	Helium valve closed
7/17/2012	3:00:37 PM	H2 valve closed
7/17/2012	3:00:37 PM	BCl3 valve closed
7/17/2012	3:00:37 PM	PH3 valve closed
7/17/2012	3:00:37 PM	SiCl4 pre valve closed
7/17/2012	3:00:37 PM	SiCl4 post valve closed
7/17/2012	3:00:37 PM	Bypass valve closed
7/17/2012	3:00:37 PM	Bubbler valve closed
7/17/2012	3:00:37 PM	Main Vac valve opened
7/17/2012	3:00:37 PM	Helium MFC set to  0.000000
7/17/2012	3:00:37 PM	H2 MFC set to  0.000000
7/17/2012	3:00:37 PM	BCl3 MFC set to  0.000000
7/17/2012	3:00:37 PM	PH3 MFC set to  0.000000
7/17/2012	3:00:37 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:00:37 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:00:38 PM	Tube furnace set to 0
7/17/2012	3:01:08 PM	H2 valve closed
7/17/2012	3:01:08 PM	BCl3 valve closed
7/17/2012	3:01:08 PM	PH3 valve closed
7/17/2012	3:01:08 PM	SiCl4 pre valve closed
7/17/2012	3:01:08 PM	SiCl4 post valve closed
7/17/2012	3:01:08 PM	Bypass valve closed
7/17/2012	3:01:08 PM	Bubbler valve closed
7/17/2012	3:01:08 PM	Helium valve opened
7/17/2012	3:01:08 PM	Main Vac valve opened
7/17/2012	3:01:08 PM	Helium MFC set to  20.000000
7/17/2012	3:01:08 PM	H2 MFC set to  0.000000
7/17/2012	3:01:08 PM	BCl3 MFC set to  0.000000
7/17/2012	3:01:08 PM	PH3 MFC set to  0.000000
7/17/2012	3:01:08 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:01:08 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:01:08 PM	Tube furnace set to 0
7/17/2012	3:01:38 PM	Helium valve closed
7/17/2012	3:01:38 PM	H2 valve closed
7/17/2012	3:01:38 PM	BCl3 valve closed
7/17/2012	3:01:38 PM	PH3 valve closed
7/17/2012	3:01:38 PM	SiCl4 pre valve closed
7/17/2012	3:01:38 PM	SiCl4 post valve closed
7/17/2012	3:01:38 PM	Bypass valve closed
7/17/2012	3:01:38 PM	Bubbler valve closed
7/17/2012	3:01:38 PM	Main Vac valve opened
7/17/2012	3:01:38 PM	Helium MFC set to  0.000000
7/17/2012	3:01:38 PM	H2 MFC set to  0.000000
7/17/2012	3:01:38 PM	BCl3 MFC set to  0.000000
7/17/2012	3:01:38 PM	PH3 MFC set to  0.000000
7/17/2012	3:01:38 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:01:38 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:01:38 PM	Tube furnace set to 0
7/17/2012	3:02:08 PM	H2 valve closed
7/17/2012	3:02:08 PM	BCl3 valve closed
7/17/2012	3:02:08 PM	PH3 valve closed
7/17/2012	3:02:08 PM	SiCl4 pre valve closed
7/17/2012	3:02:08 PM	SiCl4 post valve closed
7/17/2012	3:02:08 PM	Bypass valve closed
7/17/2012	3:02:08 PM	Bubbler valve closed
7/17/2012	3:02:08 PM	Helium valve opened
7/17/2012	3:02:08 PM	Main Vac valve opened
7/17/2012	3:02:08 PM	Helium MFC set to  20.000000
7/17/2012	3:02:08 PM	H2 MFC set to  0.000000
7/17/2012	3:02:08 PM	BCl3 MFC set to  0.000000
7/17/2012	3:02:08 PM	PH3 MFC set to  0.000000
7/17/2012	3:02:08 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:02:08 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:02:08 PM	Tube furnace set to 0
7/17/2012	3:02:38 PM	Helium valve closed
7/17/2012	3:02:38 PM	H2 valve closed
7/17/2012	3:02:38 PM	BCl3 valve closed
7/17/2012	3:02:38 PM	PH3 valve closed
7/17/2012	3:02:38 PM	SiCl4 pre valve closed
7/17/2012	3:02:38 PM	SiCl4 post valve closed
7/17/2012	3:02:38 PM	Bypass valve closed
7/17/2012	3:02:38 PM	Bubbler valve closed
7/17/2012	3:02:38 PM	Main Vac valve opened
7/17/2012	3:02:38 PM	Helium MFC set to  0.000000
7/17/2012	3:02:38 PM	H2 MFC set to  0.000000
7/17/2012	3:02:38 PM	BCl3 MFC set to  0.000000
7/17/2012	3:02:38 PM	PH3 MFC set to  0.000000
7/17/2012	3:02:38 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:02:38 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:02:38 PM	Tube furnace set to 0
7/17/2012	3:03:09 PM	H2 valve closed
7/17/2012	3:03:09 PM	BCl3 valve closed
7/17/2012	3:03:09 PM	PH3 valve closed
7/17/2012	3:03:09 PM	SiCl4 pre valve closed
7/17/2012	3:03:09 PM	SiCl4 post valve closed
7/17/2012	3:03:09 PM	Bypass valve closed
7/17/2012	3:03:09 PM	Bubbler valve closed
7/17/2012	3:03:09 PM	Helium valve opened
7/17/2012	3:03:09 PM	Main Vac valve opened
7/17/2012	3:03:09 PM	Helium MFC set to  20.000000
7/17/2012	3:03:09 PM	H2 MFC set to  0.000000
7/17/2012	3:03:09 PM	BCl3 MFC set to  0.000000
7/17/2012	3:03:09 PM	PH3 MFC set to  0.000000
7/17/2012	3:03:09 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:03:09 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:03:09 PM	Tube furnace set to 0
7/17/2012	3:03:39 PM	Helium valve closed
7/17/2012	3:03:39 PM	H2 valve closed
7/17/2012	3:03:39 PM	BCl3 valve closed
7/17/2012	3:03:39 PM	PH3 valve closed
7/17/2012	3:03:39 PM	SiCl4 pre valve closed
7/17/2012	3:03:39 PM	SiCl4 post valve closed
7/17/2012	3:03:39 PM	Bypass valve closed
7/17/2012	3:03:39 PM	Bubbler valve closed
7/17/2012	3:03:39 PM	Main Vac valve opened
7/17/2012	3:03:39 PM	Helium MFC set to  0.000000
7/17/2012	3:03:39 PM	H2 MFC set to  0.000000
7/17/2012	3:03:39 PM	BCl3 MFC set to  0.000000
7/17/2012	3:03:39 PM	PH3 MFC set to  0.000000
7/17/2012	3:03:39 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:03:39 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:03:39 PM	Tube furnace set to 0
7/17/2012	3:04:09 PM	H2 valve closed
7/17/2012	3:04:09 PM	BCl3 valve closed
7/17/2012	3:04:09 PM	PH3 valve closed
7/17/2012	3:04:09 PM	SiCl4 pre valve closed
7/17/2012	3:04:09 PM	SiCl4 post valve closed
7/17/2012	3:04:09 PM	Bypass valve closed
7/17/2012	3:04:09 PM	Bubbler valve closed
7/17/2012	3:04:09 PM	Helium valve opened
7/17/2012	3:04:09 PM	Main Vac valve opened
7/17/2012	3:04:09 PM	Helium MFC set to  20.000000
7/17/2012	3:04:09 PM	H2 MFC set to  0.000000
7/17/2012	3:04:09 PM	BCl3 MFC set to  0.000000
7/17/2012	3:04:09 PM	PH3 MFC set to  0.000000
7/17/2012	3:04:09 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:04:09 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:04:09 PM	Tube furnace set to 0
7/17/2012	3:04:39 PM	Helium valve closed
7/17/2012	3:04:39 PM	H2 valve closed
7/17/2012	3:04:39 PM	BCl3 valve closed
7/17/2012	3:04:39 PM	PH3 valve closed
7/17/2012	3:04:39 PM	SiCl4 pre valve closed
7/17/2012	3:04:39 PM	SiCl4 post valve closed
7/17/2012	3:04:39 PM	Bypass valve closed
7/17/2012	3:04:39 PM	Bubbler valve closed
7/17/2012	3:04:39 PM	Main Vac valve opened
7/17/2012	3:04:39 PM	Helium MFC set to  0.000000
7/17/2012	3:04:39 PM	H2 MFC set to  0.000000
7/17/2012	3:04:39 PM	BCl3 MFC set to  0.000000
7/17/2012	3:04:39 PM	PH3 MFC set to  0.000000
7/17/2012	3:04:39 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:04:39 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:04:39 PM	Tube furnace set to 0
7/17/2012	3:05:09 PM	H2 valve closed
7/17/2012	3:05:09 PM	BCl3 valve closed
7/17/2012	3:05:09 PM	PH3 valve closed
7/17/2012	3:05:09 PM	SiCl4 pre valve closed
7/17/2012	3:05:09 PM	SiCl4 post valve closed
7/17/2012	3:05:09 PM	Bypass valve closed
7/17/2012	3:05:09 PM	Bubbler valve closed
7/17/2012	3:05:09 PM	Helium valve opened
7/17/2012	3:05:09 PM	Main Vac valve opened
7/17/2012	3:05:10 PM	Helium MFC set to  20.000000
7/17/2012	3:05:10 PM	H2 MFC set to  0.000000
7/17/2012	3:05:10 PM	BCl3 MFC set to  0.000000
7/17/2012	3:05:10 PM	PH3 MFC set to  0.000000
7/17/2012	3:05:10 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:05:10 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:05:10 PM	Tube furnace set to 0
7/17/2012	3:05:40 PM	Helium valve closed
7/17/2012	3:05:40 PM	H2 valve closed
7/17/2012	3:05:40 PM	BCl3 valve closed
7/17/2012	3:05:40 PM	PH3 valve closed
7/17/2012	3:05:40 PM	SiCl4 pre valve closed
7/17/2012	3:05:40 PM	SiCl4 post valve closed
7/17/2012	3:05:40 PM	Bypass valve closed
7/17/2012	3:05:40 PM	Bubbler valve closed
7/17/2012	3:05:40 PM	Main Vac valve opened
7/17/2012	3:05:40 PM	Helium MFC set to  0.000000
7/17/2012	3:05:40 PM	H2 MFC set to  0.000000
7/17/2012	3:05:40 PM	BCl3 MFC set to  0.000000
7/17/2012	3:05:40 PM	PH3 MFC set to  0.000000
7/17/2012	3:05:40 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:05:40 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:05:40 PM	Tube furnace set to 0
7/17/2012	3:06:10 PM	H2 valve closed
7/17/2012	3:06:10 PM	BCl3 valve closed
7/17/2012	3:06:10 PM	PH3 valve closed
7/17/2012	3:06:10 PM	SiCl4 pre valve closed
7/17/2012	3:06:10 PM	SiCl4 post valve closed
7/17/2012	3:06:10 PM	Bypass valve closed
7/17/2012	3:06:10 PM	Bubbler valve closed
7/17/2012	3:06:10 PM	Helium valve opened
7/17/2012	3:06:10 PM	Main Vac valve opened
7/17/2012	3:06:10 PM	Helium MFC set to  20.000000
7/17/2012	3:06:10 PM	H2 MFC set to  0.000000
7/17/2012	3:06:10 PM	BCl3 MFC set to  0.000000
7/17/2012	3:06:10 PM	PH3 MFC set to  0.000000
7/17/2012	3:06:10 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:06:10 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:06:10 PM	Tube furnace set to 0
7/17/2012	3:06:40 PM	Helium valve closed
7/17/2012	3:06:40 PM	H2 valve closed
7/17/2012	3:06:40 PM	BCl3 valve closed
7/17/2012	3:06:40 PM	PH3 valve closed
7/17/2012	3:06:40 PM	SiCl4 pre valve closed
7/17/2012	3:06:40 PM	SiCl4 post valve closed
7/17/2012	3:06:40 PM	Bypass valve closed
7/17/2012	3:06:40 PM	Bubbler valve closed
7/17/2012	3:06:40 PM	Main Vac valve opened
7/17/2012	3:06:40 PM	Helium MFC set to  0.000000
7/17/2012	3:06:40 PM	H2 MFC set to  0.000000
7/17/2012	3:06:40 PM	BCl3 MFC set to  0.000000
7/17/2012	3:06:40 PM	PH3 MFC set to  0.000000
7/17/2012	3:06:40 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:06:40 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:06:40 PM	Tube furnace set to 0
7/17/2012	3:07:10 PM	H2 valve closed
7/17/2012	3:07:10 PM	BCl3 valve closed
7/17/2012	3:07:10 PM	PH3 valve closed
7/17/2012	3:07:10 PM	SiCl4 pre valve closed
7/17/2012	3:07:10 PM	SiCl4 post valve closed
7/17/2012	3:07:10 PM	Bypass valve closed
7/17/2012	3:07:10 PM	Bubbler valve closed
7/17/2012	3:07:10 PM	Helium valve opened
7/17/2012	3:07:10 PM	Main Vac valve opened
7/17/2012	3:07:10 PM	Helium MFC set to  20.000000
7/17/2012	3:07:10 PM	H2 MFC set to  0.000000
7/17/2012	3:07:10 PM	BCl3 MFC set to  0.000000
7/17/2012	3:07:10 PM	PH3 MFC set to  0.000000
7/17/2012	3:07:10 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:07:10 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:07:11 PM	Tube furnace set to 0
7/17/2012	3:07:41 PM	Helium valve closed
7/17/2012	3:07:41 PM	H2 valve closed
7/17/2012	3:07:41 PM	BCl3 valve closed
7/17/2012	3:07:41 PM	PH3 valve closed
7/17/2012	3:07:41 PM	SiCl4 pre valve closed
7/17/2012	3:07:41 PM	SiCl4 post valve closed
7/17/2012	3:07:41 PM	Bypass valve closed
7/17/2012	3:07:41 PM	Bubbler valve closed
7/17/2012	3:07:41 PM	Main Vac valve opened
7/17/2012	3:07:41 PM	Helium MFC set to  0.000000
7/17/2012	3:07:41 PM	H2 MFC set to  0.000000
7/17/2012	3:07:41 PM	BCl3 MFC set to  0.000000
7/17/2012	3:07:41 PM	PH3 MFC set to  0.000000
7/17/2012	3:07:41 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:07:41 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:07:41 PM	Tube furnace set to 0
7/17/2012	3:08:11 PM	H2 valve closed
7/17/2012	3:08:11 PM	BCl3 valve closed
7/17/2012	3:08:11 PM	PH3 valve closed
7/17/2012	3:08:11 PM	SiCl4 pre valve closed
7/17/2012	3:08:11 PM	SiCl4 post valve closed
7/17/2012	3:08:11 PM	Bypass valve closed
7/17/2012	3:08:11 PM	Bubbler valve closed
7/17/2012	3:08:11 PM	Helium valve opened
7/17/2012	3:08:11 PM	Main Vac valve opened
7/17/2012	3:08:11 PM	Helium MFC set to  20.000000
7/17/2012	3:08:11 PM	H2 MFC set to  0.000000
7/17/2012	3:08:11 PM	BCl3 MFC set to  0.000000
7/17/2012	3:08:11 PM	PH3 MFC set to  0.000000
7/17/2012	3:08:11 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:08:11 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:08:11 PM	Tube furnace set to 0
7/17/2012	3:08:41 PM	Helium valve closed
7/17/2012	3:08:41 PM	H2 valve closed
7/17/2012	3:08:41 PM	BCl3 valve closed
7/17/2012	3:08:41 PM	PH3 valve closed
7/17/2012	3:08:41 PM	SiCl4 pre valve closed
7/17/2012	3:08:41 PM	SiCl4 post valve closed
7/17/2012	3:08:41 PM	Bypass valve closed
7/17/2012	3:08:41 PM	Bubbler valve closed
7/17/2012	3:08:41 PM	Main Vac valve opened
7/17/2012	3:08:41 PM	Helium MFC set to  0.000000
7/17/2012	3:08:41 PM	H2 MFC set to  0.000000
7/17/2012	3:08:41 PM	BCl3 MFC set to  0.000000
7/17/2012	3:08:41 PM	PH3 MFC set to  0.000000
7/17/2012	3:08:41 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:08:41 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:08:41 PM	Tube furnace set to 0
7/17/2012	3:09:11 PM	H2 valve closed
7/17/2012	3:09:11 PM	BCl3 valve closed
7/17/2012	3:09:11 PM	PH3 valve closed
7/17/2012	3:09:11 PM	SiCl4 pre valve closed
7/17/2012	3:09:11 PM	SiCl4 post valve closed
7/17/2012	3:09:11 PM	Bypass valve closed
7/17/2012	3:09:11 PM	Bubbler valve closed
7/17/2012	3:09:11 PM	Helium valve opened
7/17/2012	3:09:11 PM	Main Vac valve opened
7/17/2012	3:09:11 PM	Helium MFC set to  20.000000
7/17/2012	3:09:11 PM	H2 MFC set to  0.000000
7/17/2012	3:09:11 PM	BCl3 MFC set to  0.000000
7/17/2012	3:09:11 PM	PH3 MFC set to  0.000000
7/17/2012	3:09:11 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:09:11 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:09:12 PM	Tube furnace set to 0
7/17/2012	3:09:42 PM	Helium valve closed
7/17/2012	3:09:42 PM	H2 valve closed
7/17/2012	3:09:42 PM	BCl3 valve closed
7/17/2012	3:09:42 PM	PH3 valve closed
7/17/2012	3:09:42 PM	SiCl4 pre valve closed
7/17/2012	3:09:42 PM	SiCl4 post valve closed
7/17/2012	3:09:42 PM	Bypass valve closed
7/17/2012	3:09:42 PM	Bubbler valve closed
7/17/2012	3:09:42 PM	Main Vac valve opened
7/17/2012	3:09:42 PM	Helium MFC set to  0.000000
7/17/2012	3:09:42 PM	H2 MFC set to  0.000000
7/17/2012	3:09:42 PM	BCl3 MFC set to  0.000000
7/17/2012	3:09:42 PM	PH3 MFC set to  0.000000
7/17/2012	3:09:42 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:09:42 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:09:42 PM	Tube furnace set to 0
7/17/2012	3:09:43 PM	Run finished at 3:09 PM
7/17/2012	3:09:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/17/2012	3:12:41 PM	Recipe started at 3:12 PM
7/17/2012	3:12:41 PM	Helium valve closed
7/17/2012	3:12:41 PM	H2 valve closed
7/17/2012	3:12:41 PM	BCl3 valve closed
7/17/2012	3:12:41 PM	PH3 valve closed
7/17/2012	3:12:41 PM	SiCl4 pre valve closed
7/17/2012	3:12:41 PM	SiCl4 post valve closed
7/17/2012	3:12:41 PM	Main Vac valve closed
7/17/2012	3:12:41 PM	Bypass valve closed
7/17/2012	3:12:41 PM	Bubbler valve closed
7/17/2012	3:12:41 PM	Helium MFC set to  0.000000
7/17/2012	3:12:41 PM	H2 MFC set to  0.000000
7/17/2012	3:12:41 PM	BCl3 MFC set to  0.000000
7/17/2012	3:12:41 PM	PH3 MFC set to  0.000000
7/17/2012	3:12:41 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:12:41 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:12:41 PM	Tube furnace set to 0
7/17/2012	3:12:44 PM	Helium valve closed
7/17/2012	3:12:44 PM	BCl3 valve closed
7/17/2012	3:12:44 PM	PH3 valve closed
7/17/2012	3:12:44 PM	SiCl4 pre valve closed
7/17/2012	3:12:44 PM	SiCl4 post valve closed
7/17/2012	3:12:44 PM	Main Vac valve closed
7/17/2012	3:12:44 PM	Bypass valve closed
7/17/2012	3:12:44 PM	Bubbler valve closed
7/17/2012	3:12:44 PM	H2 valve opened
7/17/2012	3:12:44 PM	Helium MFC set to  0.000000
7/17/2012	3:12:44 PM	H2 MFC set to  500.000000
7/17/2012	3:12:44 PM	BCl3 MFC set to  0.000000
7/17/2012	3:12:44 PM	PH3 MFC set to  0.000000
7/17/2012	3:12:44 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:12:44 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:12:44 PM	Tube furnace set to 0
7/17/2012	3:14:00 PM	Helium valve closed
7/17/2012	3:14:00 PM	BCl3 valve closed
7/17/2012	3:14:00 PM	PH3 valve closed
7/17/2012	3:14:00 PM	SiCl4 pre valve closed
7/17/2012	3:14:00 PM	SiCl4 post valve closed
7/17/2012	3:14:00 PM	Main Vac valve closed
7/17/2012	3:14:00 PM	Bypass valve closed
7/17/2012	3:14:00 PM	H2 valve opened
7/17/2012	3:14:00 PM	Bubbler valve opened
7/17/2012	3:14:00 PM	Helium MFC set to  0.000000
7/17/2012	3:14:00 PM	H2 MFC set to  500.000000
7/17/2012	3:14:00 PM	BCl3 MFC set to  0.000000
7/17/2012	3:14:00 PM	PH3 MFC set to  0.000000
7/17/2012	3:14:00 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:14:00 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:14:00 PM	Tube furnace set to 0
7/17/2012	3:14:01 PM	Helium valve closed
7/17/2012	3:14:02 PM	BCl3 valve closed
7/17/2012	3:14:02 PM	PH3 valve closed
7/17/2012	3:14:02 PM	SiCl4 pre valve closed
7/17/2012	3:14:02 PM	SiCl4 post valve closed
7/17/2012	3:14:02 PM	Main Vac valve closed
7/17/2012	3:14:02 PM	Bypass valve closed
7/17/2012	3:14:02 PM	H2 valve opened
7/17/2012	3:14:02 PM	Bubbler valve opened
7/17/2012	3:14:02 PM	Helium MFC set to  0.000000
7/17/2012	3:14:02 PM	H2 MFC set to  500.000000
7/17/2012	3:14:02 PM	BCl3 MFC set to  0.000000
7/17/2012	3:14:02 PM	PH3 MFC set to  0.000000
7/17/2012	3:14:02 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:14:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:14:02 PM	Tube furnace set to 1000
7/17/2012	3:34:02 PM	Helium valve closed
7/17/2012	3:34:02 PM	PH3 valve closed
7/17/2012	3:34:02 PM	Main Vac valve closed
7/17/2012	3:34:02 PM	Bypass valve closed
7/17/2012	3:34:02 PM	H2 valve opened
7/17/2012	3:34:02 PM	BCl3 valve opened
7/17/2012	3:34:02 PM	SiCl4 pre valve opened
7/17/2012	3:34:02 PM	SiCl4 post valve opened
7/17/2012	3:34:02 PM	Bubbler valve opened
7/17/2012	3:34:02 PM	Helium MFC set to  0.000000
7/17/2012	3:34:02 PM	H2 MFC set to  500.000000
7/17/2012	3:34:02 PM	BCl3 MFC set to  1.000000
7/17/2012	3:34:02 PM	PH3 MFC set to  0.000000
7/17/2012	3:34:02 PM	SiCl4 MFC set to  50.000000
7/17/2012	3:34:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:34:02 PM	Tube furnace set to 1000
7/17/2012	3:54:02 PM	Helium valve closed
7/17/2012	3:54:02 PM	BCl3 valve closed
7/17/2012	3:54:02 PM	PH3 valve closed
7/17/2012	3:54:02 PM	SiCl4 pre valve closed
7/17/2012	3:54:02 PM	SiCl4 post valve closed
7/17/2012	3:54:02 PM	Main Vac valve closed
7/17/2012	3:54:02 PM	Bypass valve closed
7/17/2012	3:54:02 PM	H2 valve opened
7/17/2012	3:54:02 PM	Bubbler valve opened
7/17/2012	3:54:02 PM	Helium MFC set to  0.000000
7/17/2012	3:54:02 PM	H2 MFC set to  500.000000
7/17/2012	3:54:02 PM	BCl3 MFC set to  0.000000
7/17/2012	3:54:02 PM	PH3 MFC set to  0.000000
7/17/2012	3:54:02 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:54:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:54:02 PM	Tube furnace set to 750
7/17/2012	3:59:02 PM	H2 valve closed
7/17/2012	3:59:02 PM	BCl3 valve closed
7/17/2012	3:59:02 PM	PH3 valve closed
7/17/2012	3:59:02 PM	SiCl4 pre valve closed
7/17/2012	3:59:02 PM	SiCl4 post valve closed
7/17/2012	3:59:02 PM	Main Vac valve closed
7/17/2012	3:59:02 PM	Bypass valve closed
7/17/2012	3:59:02 PM	Helium valve opened
7/17/2012	3:59:02 PM	Bubbler valve opened
7/17/2012	3:59:02 PM	Helium MFC set to  500.000000
7/17/2012	3:59:02 PM	H2 MFC set to  0.000000
7/17/2012	3:59:02 PM	BCl3 MFC set to  0.000000
7/17/2012	3:59:02 PM	PH3 MFC set to  0.000000
7/17/2012	3:59:02 PM	SiCl4 MFC set to  0.000000
7/17/2012	3:59:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	3:59:02 PM	Tube furnace set to 0
7/17/2012	4:19:02 PM	Helium valve closed
7/17/2012	4:19:02 PM	H2 valve closed
7/17/2012	4:19:02 PM	BCl3 valve closed
7/17/2012	4:19:02 PM	PH3 valve closed
7/17/2012	4:19:02 PM	SiCl4 pre valve closed
7/17/2012	4:19:02 PM	SiCl4 post valve closed
7/17/2012	4:19:02 PM	Main Vac valve closed
7/17/2012	4:19:02 PM	Bypass valve closed
7/17/2012	4:19:02 PM	Bubbler valve closed
7/17/2012	4:19:02 PM	Helium MFC set to  0.000000
7/17/2012	4:19:02 PM	H2 MFC set to  0.000000
7/17/2012	4:19:02 PM	BCl3 MFC set to  0.000000
7/17/2012	4:19:02 PM	PH3 MFC set to  0.000000
7/17/2012	4:19:02 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:19:02 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:19:03 PM	Tube furnace set to 0
7/17/2012	4:19:04 PM	Run finished at 4:19 PM
7/17/2012	4:31:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	4:31:45 PM	Recipe started at 4:31 PM
7/17/2012	4:31:45 PM	Helium valve closed
7/17/2012	4:31:45 PM	H2 valve closed
7/17/2012	4:31:45 PM	BCl3 valve closed
7/17/2012	4:31:45 PM	PH3 valve closed
7/17/2012	4:31:45 PM	SiCl4 pre valve closed
7/17/2012	4:31:45 PM	SiCl4 post valve closed
7/17/2012	4:31:45 PM	Main Vac valve closed
7/17/2012	4:31:45 PM	Bypass valve closed
7/17/2012	4:31:45 PM	Bubbler valve closed
7/17/2012	4:31:45 PM	Helium MFC set to  0.000000
7/17/2012	4:31:45 PM	H2 MFC set to  0.000000
7/17/2012	4:31:45 PM	BCl3 MFC set to  0.000000
7/17/2012	4:31:45 PM	PH3 MFC set to  0.000000
7/17/2012	4:31:45 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:31:45 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:31:45 PM	Tube furnace set to 0
7/17/2012	4:31:48 PM	H2 valve closed
7/17/2012	4:31:48 PM	BCl3 valve closed
7/17/2012	4:31:48 PM	PH3 valve closed
7/17/2012	4:31:48 PM	SiCl4 pre valve closed
7/17/2012	4:31:48 PM	SiCl4 post valve closed
7/17/2012	4:31:48 PM	Main Vac valve closed
7/17/2012	4:31:48 PM	Bypass valve closed
7/17/2012	4:31:48 PM	Bubbler valve closed
7/17/2012	4:31:48 PM	Helium valve opened
7/17/2012	4:31:48 PM	Helium MFC set to  500.000000
7/17/2012	4:31:48 PM	H2 MFC set to  0.000000
7/17/2012	4:31:48 PM	BCl3 MFC set to  0.000000
7/17/2012	4:31:48 PM	PH3 MFC set to  0.000000
7/17/2012	4:31:48 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:31:48 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:31:48 PM	Tube furnace set to 0
7/17/2012	4:31:52 PM	Helium valve closed
7/17/2012	4:31:52 PM	H2 valve closed
7/17/2012	4:31:52 PM	BCl3 valve closed
7/17/2012	4:31:52 PM	PH3 valve closed
7/17/2012	4:31:52 PM	SiCl4 pre valve closed
7/17/2012	4:31:52 PM	SiCl4 post valve closed
7/17/2012	4:31:52 PM	Main Vac valve closed
7/17/2012	4:31:52 PM	Bypass valve closed
7/17/2012	4:31:52 PM	Bubbler valve closed
7/17/2012	4:31:52 PM	Helium MFC set to  0.000000
7/17/2012	4:31:52 PM	H2 MFC set to  0.000000
7/17/2012	4:31:52 PM	BCl3 MFC set to  0.000000
7/17/2012	4:31:52 PM	PH3 MFC set to  0.000000
7/17/2012	4:31:52 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:31:52 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:31:52 PM	Tube furnace set to 0
7/17/2012	4:31:53 PM	Run finished at 4:31 PM
7/17/2012	4:31:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2012	4:37:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2012	4:37:06 PM	Recipe started at 4:37 PM
7/17/2012	4:37:06 PM	Helium valve closed
7/17/2012	4:37:06 PM	H2 valve closed
7/17/2012	4:37:06 PM	BCl3 valve closed
7/17/2012	4:37:06 PM	PH3 valve closed
7/17/2012	4:37:06 PM	SiCl4 pre valve closed
7/17/2012	4:37:06 PM	SiCl4 post valve closed
7/17/2012	4:37:06 PM	Main Vac valve closed
7/17/2012	4:37:06 PM	Bubbler valve closed
7/17/2012	4:37:06 PM	Bypass valve opened
7/17/2012	4:37:06 PM	Helium MFC set to  0.000000
7/17/2012	4:37:06 PM	H2 MFC set to  0.000000
7/17/2012	4:37:06 PM	BCl3 MFC set to  0.000000
7/17/2012	4:37:06 PM	PH3 MFC set to  0.000000
7/17/2012	4:37:06 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:37:06 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:37:06 PM	Tube furnace set to 0
7/17/2012	4:38:23 PM	Helium valve closed
7/17/2012	4:38:23 PM	H2 valve closed
7/17/2012	4:38:23 PM	BCl3 valve closed
7/17/2012	4:38:23 PM	PH3 valve closed
7/17/2012	4:38:23 PM	SiCl4 pre valve closed
7/17/2012	4:38:23 PM	SiCl4 post valve closed
7/17/2012	4:38:23 PM	Main Vac valve closed
7/17/2012	4:38:23 PM	Bubbler valve closed
7/17/2012	4:38:23 PM	Bypass valve opened
7/17/2012	4:38:23 PM	Helium MFC set to  0.000000
7/17/2012	4:38:23 PM	H2 MFC set to  0.000000
7/17/2012	4:38:23 PM	BCl3 MFC set to  0.000000
7/17/2012	4:38:23 PM	PH3 MFC set to  0.000000
7/17/2012	4:38:23 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:38:23 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:38:23 PM	Tube furnace set to 0
7/17/2012	4:39:23 PM	Helium valve closed
7/17/2012	4:39:23 PM	H2 valve closed
7/17/2012	4:39:23 PM	BCl3 valve closed
7/17/2012	4:39:23 PM	PH3 valve closed
7/17/2012	4:39:23 PM	SiCl4 pre valve closed
7/17/2012	4:39:23 PM	SiCl4 post valve closed
7/17/2012	4:39:23 PM	Bypass valve closed
7/17/2012	4:39:23 PM	Bubbler valve closed
7/17/2012	4:39:23 PM	Main Vac valve opened
7/17/2012	4:39:23 PM	Helium MFC set to  0.000000
7/17/2012	4:39:23 PM	H2 MFC set to  0.000000
7/17/2012	4:39:23 PM	BCl3 MFC set to  0.000000
7/17/2012	4:39:23 PM	PH3 MFC set to  0.000000
7/17/2012	4:39:23 PM	SiCl4 MFC set to  0.000000
7/17/2012	4:39:23 PM	Bypass solenoid MFC set to  0.000000
7/17/2012	4:39:23 PM	Tube furnace set to 0
7/17/2012	4:39:24 PM	Run finished at 4:39 PM
7/17/2012	4:39:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
